Edwards PT66-1Z-000 半导体涡轮分子泵

Edwards PT66-1Z-000 半导体涡轮分子泵 

1.产 品 资 料 介 绍：

Edwards PT66-1Z-000 半导体涡轮分子泵 产品英文介绍

Edwards 8135928G003XS is a CTI series helium low-temperature compressor that provides high-pressure high-purity helium circulation for low-temperature cold heads, driving low-temperature pumps to achieve high vacuum.

Application areas

1. Low temperature pump gas supply for semiconductor ion implantation equipment

2. Vacuum system for semiconductor PVD coating equipment

3. Low temperature vacuum unit matching for etching machine chamber

4. Compound semiconductor process vacuum pumping

5. Low temperature system for flat panel display vapor deposition equipment

6. Research laboratory ultra-high vacuum platform

7. Vacuum unit of electron beam detection equipment

8. Low temperature vacuum device for space simulation cabin

9. Power supply for low-temperature pump of optical coating machine

10. High vacuum process equipment for semiconductor FAB production line

Product Parameters

1. Closed loop helium circulation, providing high-pressure and high-purity helium medium for low-temperature cold heads

2. Water cooled cooling structure, suitable for continuous 24-hour production conditions in factories

3. Built in helium filtration and adsorption module to reduce cold head pollution loss

4. Equipped with pressure and temperature fault detection, supporting alarm signal output

5. Compatible with corresponding series of low-temperature pumps, suitable for semiconductor clean room working conditions

In summary, the Edwards 8135928G003XS low-temperature compressor operates stably and is the core power unit of the semiconductor high vacuum low-temperature pump system

Edwards PT66-1Z-000 半导体涡轮分子泵  产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218