1.产 品 资 料 介 绍：
Edwards 3620-00219 干式真空泵 产品英文介绍
Edwards 3620-00219 dry vacuum pump, oil-free dry roughing pump for semiconductor equipment.
Product Features:
1. Oil free design of pump chamber to prevent oil vapor pollution of process chamber
2. Non contact operation of the rotor, minimal wear, and long service life
3. Support blowing gas input, capable of handling process gases with particles and corrosive properties
4. Built in gas ballast function, capable of extracting condensable steam
5. It has local status display and can view running and fault codes
6. Support PLC remote start stop and alarm signal output
7. Water cooling and heat dissipation, stable operating temperature under high load conditions
8. Anti particle inhalation, reducing the risk of pump chamber blockage
9. Modular structure, easy maintenance and disassembly
10. Adapt to the continuous operation of the production line 24/7 without interruption
Product Parameters:
1. Pump type: oil-free dry vacuum pump
2. Cooling method: Water cooling
3. Control interface: switch IO, supports remote monitoring
4. Protection: Over temperature, motor overload, abnormal flow protection
5. Applicable operating conditions: rough vacuum extraction of semiconductor cavity
Edwards 3620-00219 is commonly used in vacuum roughing stations for etching and deposition equipment.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
