Pearl Kogyo RP-5000-60MA 射频发生器

Pearl Kogyo RP-5000-60MA 射频发生器 

1.产 品 资 料 介 绍：

Pearl Kogyo RP-5000-60MA 射频发生器 产品英文介绍

Pearl Kogyo RP-500-60MA RF generator, semiconductor plasma RF power supply unit.

Product Features:

1. All solid state RF closed-loop output with high power regulation accuracy

2. Rapid arc suppression to cope with chamber ignition impact

3. Low reflectivity tolerance, stable operation under load fluctuations

4. View operating parameters and fault codes on the local panel

5. Support remote control of PLC through analog and digital interfaces

6. Rack mounted structure, easy to disassemble, ｒｅｐｌａｃｅ and maintain

7. Air cooling and heat dissipation, suitable for 7 × 24-hour operation of production lines

8. Real time feedback of power status for process monitoring

9. Fault log storage for easy troubleshooting

10. Adapt to plasma loading for etching and thin film deposition

Product Parameters:

1. Rated power: 5kW

2. Operating frequency: 13.56MHz

3. Interface: Analog I/O, Digital Communication Interface

4. Protection: Over power, over-current, over temperature, reflected power protection

5. Cooling method: air-cooled

Pearl Kogyo RP-500-60MA is used for semiconductor etching and PVD plasma RF power supply.

Pearl Kogyo RP-5000-60MA 射频发生器 产品展示

视频展示

其他产品

 5SHY3545L0009 3BHB013085R0001 可控硅模块
 3BHE019719R0101 模拟数字量的采集模块
 IDPG 940128102 数字量控制板卡

英文产品

A0845A 3BSE045584R1 processor module
AI845 3BSE023675R1 control module
AO845A-eA 3BSE045584R2 processor module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218