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AE 3152412-223 直流电源模块

发布时间:2026-09-01人气:
  • AE 3152412-223 直流电源模块
  • AE 3152412-223 直流电源模块
  • AE 3152412-223 直流电源模块

AE 3152412-223 直流电源模块 

1.产 品 资 料 介 绍:

AE 3152412‑223 是 Pinnacle 系列半导体磁控溅射大功率直流电源,用于薄膜工艺直流溅射供电,输出稳定,电弧抑制能力强。
产品特点:
1. 电弧快速响应抑制,低储能,减少靶材打弧损伤
2. 恒功率、恒压、恒流多模式输出,工艺可调范围大
3. 功率因数高,整机转换效率优异,长期连续运行稳定
4. 支持多种工业通讯总线,可对接机台实现程控监控
5. 具备过压、过流、过温多重保护,故障告警反馈
产品参数:
1. 额定输出功率:20kW
2. 输入电源:三相 408VAC 50/60Hz
3. 工作模式:恒压 / 恒流 / 恒功率
4. 冷却方式:风冷
5. 通讯接口:DeviceNet、模拟接口
应用领域:
1. 半导体磁控溅射薄膜沉积工艺供电
2. 金属化镀膜设备直流靶源驱动
3. 平板显示镀膜设备电源单元
4. 真空 PVD 工艺设备功率供给
5. 半导体工艺设备备件替换
AE 3152412‑223 可为各类 PVD 溅射工艺提供高精度、抗电弧的直流功率输出。

AE 3152412-223 直流电源模块 产品英文介绍

AE 3152412-223 is a high-power DC power supply for Pinnacle series semiconductor magnetron sputtering, used for DC sputtering power supply in thin film processes, with stable output and strong arc suppression capability.

Product Features:

1. Rapid response suppression of arc, low energy storage, and reduction of target material arc damage

2. Constant power, constant voltage, and constant current multi-mode output, with a wide range of adjustable processes

3. High power factor, excellent overall conversion efficiency, and stable long-term continuous operation

4. Supports multiple industrial communication buses and can be connected to machines for programmable monitoring

5. Equipped with multiple protections for overvoltage, overcurrent, and overtemperature, with fault alarm feedback

Product Parameters:

1. Rated output power: 20kW

2. Input power supply: three-phase 408VAC 50/60Hz

3. Working mode: constant voltage/constant current/constant power

4. Cooling method: air cooling

5. Communication interface: DeviceNet, analog interface

Application fields:

1. Power supply for semiconductor magnetron sputtering thin film deposition process

2. DC target source drive for metalized coating equipment

3. Power supply unit for flat panel display coating equipment

4. Power supply for vacuum PVD process equipment

5. Replacement of spare parts for semiconductor process equipment

AE 3152412-223 can provide high-precision, arc resistant DC power output for various PVD sputtering processes.

AE 3152412-223 直流电源模块 产品展示

3152412-223 (3).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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