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Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机

发布时间:2026-09-02人气:
  • Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机
  • Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机
  • Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机

Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机 

1.产 品 资 料 介 绍:

Yaskawa SGM7D‑1C1FC‑TE12 是安川 Sigma‑7 系列中空外转子直驱伺服电机,多用于半导体设备旋转工位精密驱动。
产品特点:
1. 直驱无减速机构,消除背隙,定位重复精度高
2. 内置 24 位高分辨率编码器,角度控制精准稳定
3. 大口径中空结构,方便线缆管路从中穿过走线
4. 高惯量设计,可承载大惯量负载,抗冲击能力强
5. 全封闭自冷结构,低粉尘,适配设备长时间连续运行
产品参数:
1. 型号:SGM7D‑1C1FC‑TE12
2. 电机类型:外转子中空直驱 DD 伺服电机
3. 编码器:24‑bit 绝对值编码器
4. 供电等级:AC200V
5. 安装方式:法兰直装
应用领域:
1. 半导体设备晶圆旋转平台驱动
2. 检测设备转台、真空腔旋转工位执行
3. 晶圆搬运旋转轴、EFEM 旋转机构
4. 旧设备直驱电机故障备件替换维修
5. 半导体自动化设备备件库存储备
该 SGM7D‑1C1FC‑TE12 直驱伺服电机无间隙传动,是半导体旋转工位实现高精度角度控制的核心驱动部件。

Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机 产品英文介绍

Yaskawa SGM7D 1C1FC TE12 is an Yaskawa Sigma 7 series hollow outer rotor direct drive servo motor, commonly used for precision driving of semiconductor equipment rotating stations.

Product Features:

1. Direct drive without deceleration mechanism, eliminating backlash, high positioning repeatability accuracy

2. Built in 24 bit high-resolution encoder for precise and stable angle control

3. Large diameter hollow structure, convenient for cable pipelines to pass through and route wires

4. High inertia design, capable of carrying large inertia loads and strong impact resistance

5. Fully enclosed self cooling structure, low dust, suitable for long-term continuous operation of equipment

Product Parameters:

1. Model: SGM7D -1C1FC - TE12

2. Motor type: External rotor hollow direct drive DD servo motor

3. Encoder: 24 bit absolute value encoder

4. Power supply level: AC200V

5. Installation method: flange direct installation

Application fields:

1. Semiconductor equipment wafer rotation platform driver

2. Inspection equipment turntable and vacuum chamber rotating station execution

3. Wafer handling rotation axis and EFEM rotation mechanism

4. Replacement and maintenance of spare parts for faulty direct drive motors of old equipment

5. Spare parts inventory reserve for semiconductor automation equipment

The SGM7D-1C1FC-TE12 direct drive servo motor has seamless transmission and is the core driving component for achieving high-precision angle control in semiconductor rotary workstations.

Yaskawa SGM7D-1C1FC-TE12 直驱伺服电机 产品展示

SGM7D-1C1FC-TE12.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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