1.产 品 资 料 介 绍：
SMC INR-495-006 循环式温控器 产品英文介绍
SMC INR-495-006 is a SMC semiconductor specific cyclic temperature controller that provides closed-loop constant temperature cyclic cooling for process equipment.
Product Features:
1. PID closed-loop temperature control, with small temperature fluctuations, ensures semiconductor process consistency
2. Built in circulation pump, closed pipeline, compatible with deionized coolant, less likely to contaminate the pipeline
3. Equipped with multiple protections for liquid level, flow rate, and over temperature, with fault alarm prompts
4. Supports serial communication and can interact with the main control of semiconductor machines to determine their operational status
5. Vertical compact cabinet, supporting 7 × 24-hour uninterrupted production operation
Product Parameters:
1. Model: INR-495-006
2. Equipment type: Circulating liquid temperature controller
3. Cooling method: air-cooled circulating cooling
4. Circulating medium: deionized water, ethylene glycol mixed cooling liquid
5. Communication: Supports serial device docking
Application fields:
1. Constant temperature cooling of cavity components in semiconductor etching and deposition equipment
2. RF power supply, power module heat dissipation temperature control
3. The vacuum molecular pump unit is equipped with heat dissipation and temperature control
4. Replacement and repair of the entire machine for the faulty old temperature controller on the production line
5. Inventory reserve of temperature control spare parts in semiconductor factories
The INR-495-006 circulating temperature controller outputs stable constant temperature circulating liquid and is an important supporting unit for the temperature control system of semiconductor process equipment.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
