1.产 品 资 料 介 绍：
AMAT 0190-13851 旋转联合溅射机 产品英文介绍
AMAT 0190-13851 is a PVD rotary sputtering assembly used for magnetron sputtering coating on AMAT P5000 equipment.
Product Features
1. Compatible with P5000 machine, with good interchangeability
2. Wafer rotating base to improve film uniformity
3. Water cooling to resist plasma corrosion and reduce particles
4. Vacuum sealed chamber, stable process environment
5. Equipped with speed sensor, supporting 7 × 24h mass production
Product Parameters
1. Model: 0190-13851
2. Type: Rotating Sputtering Assembly
3. Adaptation: AMAT P5000 PVD equipment
4. Process: Magnetron Sputtering Deposition
5. Composition: Rotating Base+Sputtering Cathode
Application Areas
1. PVD equipment wafer metal film sputtering
2. Thin film process for interconnect layer and barrier layer
3. Spare parts for process components of semiconductor coating equipment
4. Replacement and repair of faulty sputtering assembly
5. Factory process spare parts reserve
The 0190-13851 assembly relies on a rotating mechanism to ensure uniform film formation and is the core process component of PVD coating.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
