AMAT 0010-01711 机器人驱动器

AMAT 0010-01711 机器人驱动器 

1.产 品 资 料 介 绍：

AMAT 0010-01711 机器人驱动器 产品英文介绍

AMAT 0010-01711 robot driver, specialized servo drive unit for semiconductor equipment, stable output, suitable for motion control of wafer handling robots.

Product Features:

1. Servo closed-loop control, high positioning repeatability, suitable for precision wafer handling

2. Anti plasma electromagnetic interference, suitable for complex electromagnetic environments around process chambers

3. Onboard fault self check and hardware interlock, timely alarm protection equipment for abnormalities

4. Standardized board card installation, supporting quick insertion and replacement, shortening downtime maintenance time

5. Compatible with AMAT platform communication protocol, can directly interface with device control system

Product Parameters:

1. Equipment type: Robot servo drive board

2. Target audience: Semiconductor wafer transfer robotic arm

3. Working voltage: 24-48VDC

4. Supports multi axis motion control and has current overload protection

5. Working temperature: 5-50 ℃, suitable for internal working conditions of equipment cabinets

Application fields:

1. AMAT Endura and Centura platform wafer manipulator drive

2. Wafer transfer mechanism inside the etching equipment chamber

3. Material handling between the film deposition equipment box and the process chamber

4. Multi axis robot motion control for semiconductor vacuum equipment

5. Robot arm execution unit driver for wafer inspection equipment

High reliability and platform compatibility make AMAT 0010-01711 the core driving component of semiconductor process equipment manipulators.

AMAT 0010-01711 机器人驱动器 产品展示

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其他产品

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TRICONEX 2000417 数字输出模块
BREAKOUT 810-800082-043 PCB模块

英文产品

3BHE042816R0101 PCD244A101 controller card
KJ3204X1-BA1 12P3275X032 analog output module
KJ4001X1-CJ1 VE4002S1T2B5 analog output module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218