Advanced Energy 3150058-002射频发生器

Advanced Energy 3150058-002射频发生器 

1.产 品 资 料 介 绍：

Advanced Energy 3150058-002射频发生器 产品英文介绍

Advanced Energy 3150058-002 RF Generator (RF-20RWC) provides stable RF power output for semiconductor plasma processes.

Product Features

1. High precision output power control, stable power output under plasma conditions

2. Built in arc suppression protection, quick handling of ignition, reducing process losses

3. Water cooling and heat dissipation design, capable of supporting long-term continuous full load operation

4. Capable of local panel operation and supporting remote control of analog signals

5. Rack mounted standard chassis, suitable for installation in semiconductor equipment cabinets

Product Specifications

1. Three phase input 208VAC, 50/60Hz

2. Rated output power 2000W, output frequency 12.56MHz

3. Water cooling method ensures the overall heat dissipation performance of the machine

4. Supports analog interfaces and can be integrated with device control systems

5. Standard industrial rack installation structure

Application Areas

1. Semiconductor plasma etching process equipment

2. Thin film deposition PVD process chamber

3. Semiconductor cavity cleaning process system

4. Vacuum plasma processing equipment

5. Research vacuum plasma experimental platform

The Advanced Energy 3150058-002 RF generator is a commonly used RF power spare part in semiconductor process equipment.

Advanced Energy 3150058-002射频发生器 产品展示

视频展示

其他产品

OMACO GF0-57CQD-002 触摸屏
HIMA K9203 996920302 风扇散热模块
HIMA K9203A 996920360 高速计数模块 

英文产品

 12KM02E-V0002 3EGM030300R0002 control card
ACROMAG 651T-0600 Digital channel module
GE DS200LDCCH1ALA steam turbine card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218