AMAT 0190-08825干式泵

AMAT 0190-08825干式泵 

1.产 品 资 料 介 绍：

AMAT 0190-08825干式泵 产品英文介绍

AMAT 0190-08825 dry pump (IPUP T100L) is an oil-free front-end dry vacuum pump used in semiconductor equipment.

Product Features

1. Oil free design to avoid contamination of vacuum chamber by oil vapor reflux

2. Corrosion resistant process gas, suitable for semiconductor process exhaust gas extraction

3. Low operating vibration, low overall noise, suitable for clean workshop conditions

4. Built in runtime statistics, with maintenance reminder and alarm functions

5. Support communication docking with device master control to achieve pump unit status monitoring

Product Specifications

1. Three phase industrial AC power supply, compatible with semiconductor equipment power supply system

2. Dry oil-free pumping structure, used as a front-end vacuum pump for equipment

3. Adapt to factory circulating water cooling for heat dissipation, ensuring continuous operation and heat dissipation

4. Support device bus communication, capable of uploading operation and fault signals

5. The whole machine is a floor standing compact pump body, suitable for installation on the outside of the machine

Application Areas

1. AMAT PVD thin film deposition equipment pre stage vacuum pumping

2. Semiconductor etching process equipment vacuum system

3. Exhaust gas extraction from CVD chemical vapor deposition equipment

4. Wafer processing equipment vacuum chamber roughing unit

5. Maintenance and replacement of spare parts for semiconductor production line equipment

AMAT 0190-08825 dry pump is the core pumping spare part for achieving clean vacuum using material machines.

AMAT 0190-08825干式泵 产品展示

视频展示

其他产品

GE SR469-P5-HI-A20-E 电机管理继电器
A-B 1756-ENBT/A 通信模块
 AIM0006 2RCA021397A0001F 控制器模块 

英文产品

GE VMIVME-017807-411001 Gas turbine module
 5SHX06F6004 3BHB003387R0101 Thyristor module
 5SXE05-0151 3BHB003151P104 Thyristor module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218