1.产 品 资 料 介 绍：
AMAT 0010-70264机器人驱动器 产品英文介绍
The Nikon 4T070-362-3 amplifier (GCTX) is a dedicated driver amplifier board for Nikon ArF immersion lithography machines, responsible for amplifying the signal power output of optical path actuators.
Product Features
1. High signal amplification accuracy, fast output response, ensuring nanoscale positioning of optical mechanisms
2. Built in overcurrent and overload protection, suppresses instantaneous impact, and protects backend execution devices
3. Industrial grade board design, resistant to electromagnetic interference, suitable for clean cabinet environments of lithography machines
4. Real time feedback signal acquisition, facilitating closed-loop control and adjustment of the machine system
5. Modular slot structure, easy disassembly and assembly, reducing equipment downtime for maintenance
Product Specifications
1. Machine backplane power supply, compatible with the internal power supply circuit of the lithography machine
2. Multi channel driver amplification channel, output driver optical actuator component
3. Support internal dedicated bus of the device to achieve signal interaction
4. The working environment temperature is 5-40 ℃, which meets the working conditions of the lithography workshop
5. CPCI slot type board, directly inserted into the device chassis for use
Application Areas
1. Nikon NSR-S620D Immersion Lithography System
2. Optical adjustment mechanism driving unit of lithography equipment
3. Exposure light path execution device power amplification control
4. Semiconductor scanning lithography machine signal processing unit
5. Repair and replacement spare parts for semiconductor lithography equipment
The Nikon 4T070-362-3 amplifier is a key power amplifier spare part for the optical control system of immersion lithography machines.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
