1.产 品 资 料 介 绍：
Nikon 4T070-360-1精准控制器模块 产品英文介绍
The Nikon 4T070-360-1 precision controller module is a dedicated position control component for Nikon lithography machines, mainly responsible for optical component position resolution and servo command output.
Product Features
1. High resolution sampling capability, real-time reading of position sensor feedback data, suppressing position drift
2. Equipped with local parameter storage function, it can quickly retrieve process parameters after replacement, reducing the need for recalibration work
3. Hardware filtering circuit, filtering cabinet clutter interference, stabilizing control output signal
4. Equipped with status diagnosis, it can quickly locate the fault point of the control link and facilitate on-site troubleshooting
5. Integrated signal conversion function on the board, directly connected to the backend power amplifier, simplifying the system link
Product Specifications
1. Internal working power is provided by the device backplane
2. Multi channel position acquisition and control output interface
3. Compatible with exclusive internal communication bus for lithography machines
4. Operating environment temperature of 5-40 ℃, suitable for cleanroom cabinet conditions
5. CPCI board form, slot insertion installation
Application Areas
1. Nikon series immersion lithography machine optical tuning unit
2. Position control of micro motion mechanism inside the exposure system
3. Alignment detection system signal acquisition and processing
4. Closed loop adjustment system for optical components of lithography equipment
5. Replacement and maintenance of spare parts for faulty machines on the production line
The Nikon 4T070-360-1 precision controller module is responsible for the position acquisition and command output of the optical components of the lithography machine, and is a key board spare part to ensure exposure accuracy.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
