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Bird Electronics 8921SC13同轴电阻器

发布时间:2026-09-04人气:
  •  Bird Electronics 8921SC13同轴电阻器
  •  Bird Electronics 8921SC13同轴电阻器
  •  Bird Electronics 8921SC13同轴电阻器

 Bird Electronics 8921SC13同轴电阻器  

1.产 品 资 料 介 绍:

Bird Electronics 8921SC13 同轴电阻器,属于射频大功率假负载,半导体设备用来校准射频电源,负载好坏直接影响射频校准精度。
产品特点
1、驻波性能稳定,工作波动小,减少校准误差
2、油冷散热,可承受大功率长时间测试作业
3、阻抗精度高,保障射频测试数据可靠
4、带温度联锁,超温可保护射频电源不受损坏
5、整机集成式,对接安装方便,维护省事
产品参数
1、额定功率 5000W,阻抗 50 欧姆
2、适配 13.56MHz 主流射频频段
3、油冷散热,仅支持水平安装
4、专用射频接口对接射频发生器
5、适应车间设备机房环境
应用领域
1、刻蚀、PVD 设备射频电源校准
2、射频源功率标定测试
3、等离子设备射频系统维护校验
4、大功率射频测试端接负载
5、产线备件替换
Bird Electronics 8921SC13 同轴电阻器老化后驻波会变差,造成校准不准,间接干扰晶圆工艺状态。

 Bird Electronics 8921SC13同轴电阻器  产品英文介绍

Bird Electronics 8921SC13 coaxial resistor is a high-power RF dummy load used in semiconductor equipment to calibrate RF power supplies. The quality of the load directly affects the accuracy of RF calibration.

Product Features

1. Stable standing wave performance, minimal operational fluctuations, and reduced calibration errors

2. Oil cooled heat dissipation, capable of withstanding high-power and long-term testing operations

3. High impedance accuracy ensures reliable RF test data

4. Equipped with temperature interlock, overheating can protect the RF power supply from damage

5. The whole machine is integrated, easy to connect and install, and easy to maintain

Product Specifications

1. Rated power 5000W, impedance 50 ohms

2. Adapt to the mainstream radio frequency band of 13.56MHz

3. Oil cooled heat dissipation, only supports horizontal installation

4. Dedicated RF interface for docking with RF generator

5. Adapt to the workshop equipment room environment

Application Areas

1. RF power calibration for etching and PVD equipment

2. RF source power calibration test

3. Maintenance and calibration of plasma equipment RF system

4. High power RF test terminal load

5. Replacement of production line spare parts

After aging, the standing wave of Bird Electronics 8921SC13 coaxial resistor will deteriorate, causing inaccurate calibration and indirectly interfering with the wafer process status.

 Bird Electronics 8921SC13同轴电阻器  产品展示

8921SC13.webp (1).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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