AMAT 0010-42743射频控制器

AMAT 0010-42743射频控制器 

1.产 品 资 料 介 绍：

AMAT 0010-42743射频控制器 产品英文介绍

AMAT 0010-42743 RF controller is the core control component for semiconductor equipment to manage RF power supply.

Product Features:

1. RF power closed-loop control, precise output control, minimal process fluctuations

2. Real time monitoring of various states of the RF circuit, responding quickly to abnormalities

3. Original modular structure, direct in-situ replacement, easy on-site replacement

4. Anti electromagnetic interference inside the cabinet, reliable for long-term operation

5. Coordinated with the matching device and RF generator, the entire system has strong compatibility

Product Parameters:

1. Compatible with the original communication bus of the machine, receiving process instructions issued by the entire machine

2. Collect power, standing wave and other signals, and provide feedback to the equipment master control

3. Adapt to the normal operating temperature range inside the cabinet

4. Support calling for local and remote settings of RF parameters

5. Fault output alarm information for easy maintenance and location of the fault point

Application fields:

1. RF power system control and management of etching equipment

2. PECVD thin film deposition RF circuit signal control

3. RF parameter adjustment and control of plasma cleaning equipment

4. Replacement of damaged spare parts for the RF control unit of an old machine

5. RF process debugging and use after equipment overhaul and maintenance

AMAT 0010-42743 controls the instruction logic of the entire RF system, directly affecting the stable output of the machine process.

AMAT 0010-42743射频控制器 产品展示

视频展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218