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Sekidenko 991-0001-00机架式激光传输系统

发布时间:2026-09-08人气:
  • Sekidenko 991-0001-00机架式激光传输系统
  • Sekidenko 991-0001-00机架式激光传输系统

Sekidenko 991-0001-00机架式激光传输系统  

1.产 品 资 料 介 绍:

Sekidenko 991‑0001‑00 机架式激光传输系统,半导体测温设备专用机架集成激光光路传输单元。
产品特点:
1、光路损耗低,激光光束传输稳定,测温信号失真小
2、机架一体化集成,光路屏蔽防护好,隔绝车间杂光干扰
3、内部光路组件模块化,局部损坏可单独更换,不用整套拆解
4、抗机柜震动,长时间运行光束偏移量小
5、适配设备机架安装,接线调试步骤简洁
产品参数:
1、匹配半导体测温主机光信号接口,传输激光收发信号
2、内置光路监测,反馈光束状态给到整机主控
3、适配机柜内部常规温湿度洁净工况
4、机架标准化安装尺寸,兼容设备原有机柜槽位
5、光路异常输出告警,便于快速定位光路故障
应用领域:
1、半导体刻蚀、镀膜设备晶圆非接触测温光路传输
2、工艺腔内部温度检测系统激光光路配套
3、老旧机台激光传输单元老化备件替换
4、半导体设备翻新项目光路模组配套
5、腔体维护后测温光路校准调试
Sekidenko 991‑0001‑00 光路传输的稳定性,直接影响晶圆温度检测精度,决定工艺温控的实际效果

Sekidenko 991-0001-00机架式激光传输系统  产品英文介绍

Sekidenko 991-0001-00 rack mounted laser transmission system, a dedicated rack integrated laser optical path transmission unit for semiconductor temperature measurement equipment.

Product Features:

1. Low optical path loss, stable laser beam transmission, and minimal distortion of temperature measurement signals

2. Rack integration, good optical path shielding and protection, isolating workshop interference from stray light

3. The internal optical path components are modularized, and partial damage can be replaced separately without the need for complete disassembly

4. Anti cabinet vibration, small beam offset during long-term operation

5. Adapt to equipment rack installation, with simple wiring and debugging steps

Product Parameters:

1. Matching semiconductor temperature measurement host optical signal interface, transmitting laser transceiver signals

2. Built in optical path monitoring, providing feedback on the beam status to the main control of the entire machine

3. Adapt to the regular temperature, humidity, and clean working conditions inside the cabinet

4. Standardized installation dimensions of the rack, compatible with the original cabinet slots of the equipment

5. Abnormal output alarm of optical path, easy to quickly locate optical path faults

Application fields:

1. Semiconductor etching and coating equipment, wafer non-contact temperature measurement optical path transmission

2. Laser optical path matching for temperature detection system inside the process chamber

3. Replacement of aging spare parts for laser transmission units of old machines

4. Semiconductor equipment renovation project optical module matching

5. Calibration and debugging of temperature measurement optical path after cavity maintenance

The stability of Sekidenko 991-0001-00 optical path transmission directly affects the accuracy of wafer temperature detection and determines the actual effect of process temperature control

Sekidenko 991-0001-00机架式激光传输系统  产品展示

991-0001-00.webp (1).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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