Kawasaki 3NT420B-B029双刀片晶圆传送机器人
1.产 品 资 料 介 绍：
Kawasaki 3NT420B-B029双刀片晶圆传送机器人 产品英文介绍
Kawasaki 3NT420B-B029 is a commonly used dual blade wafer transfer robot by Kawasaki, which operates alternately with two hands and is suitable for clean transfer inside EFEM.
1. Alternating the use of dual blades with both hands to enhance the speed of film transfer
2. High rigidity arm body, smooth operation, reduces the risk of wafer scratches
3. ISO1 level cleanliness standard, good dust control on the production line
4. Compact eccentric arm, no need for walking axis, saving internal space of the equipment
5. Built in security protection, compatible with SEMI standards, convenient for device integration
6. Maximum arm span 1226.6mm
7. Z-axis lifting stroke 400mm
8. Repetitive positioning accuracy ± 0.05mm
9. Rotate the base 340 °
10. Cleanliness level ISO Class 1
11. Transfer of wafer boxes and process cavities within the EFEM module
12. Lithography and etching equipment for wafer loading and unloading
13. Automatic feeding and discharging of thin film deposition equipment
14. Wafer inspection, measurement, substrate handling
15. Semiconductor substrate and carrier ring transport
This 3NT420B-B029 has good stability in semiconductor front-end equipment, and many wafer equipment integrations will choose it
Kawasaki 3NT420B-B029双刀片晶圆传送机器人 产品展示
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| PMB33C-10201-02 | 07NG66R1 | UT 372c |
| PMB33C-10201-01 | 07KT31 | 5730030-F DSAI 130 |
| PMB33C-10201-00 | NKTU02 | M21NRXC-LDN-NS-00 |
| PMB33C-10200-03 | IMSDO01 | 57120001-Z DSTA 130 |
| PMB33C-10200-02 | PHBBLK10000100 | R43HEAA-R2-NS-VS-00 |
| PMB33C-10200-01 | AMAT 0100-00056 | 57160001-GV DSDI 131 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
