Varian H4152001均匀性监测仪

Varian H4152001均匀性监测仪  

1.产 品 资 料 介 绍：

Varian H4152001均匀性监测仪  产品英文介绍

The Varian H4152001 uniformity monitor is a specialized detection unit for ion implantation machines, used to collect real-time data on the distribution of ion implantation dose on the wafer surface.

1. Multi point synchronous sampling, obtaining uniformity data of the entire wafer injection at once, quickly identifying regional deviations;

2. Equipped with a built-in signal calibration circuit, it is not easy to drift during long-term operation, ensuring consistency in testing between batches;

3. Adapt to the vacuum chamber environment of the machine and withstand the radiation and thermal effects under ion implantation conditions;

4. The uniformity report can be directly uploaded to the host, and exceeding the standard will automatically trigger a process alarm;

5. Modular board structure, can be replaced separately after a fault, without the need to shut down the entire machine for disassembly.

1. Compatible models: Varian 350D/350DE/300XP ion implantation machine;

2. Test object: Uniformity of ion implantation dose on wafers;

3. Data output: digital signal docking with the main control system of the machine;

4. Working environment: inside the vacuum chamber;

5. Board version Rev. C.

1. Online monitoring of doping uniformity in ion implantation process wafers;

2. Verify the beam distribution of the scanning ion beam;

3. Continuous monitoring of process stability during mass production;

4. Verification of injection effect after regular maintenance of the machine;

5. Data collection for troubleshooting ion implantation chambers.

This H4152001 is the core testing spare part of Varian ion implantation machine, which directly determines the yield control capability of doping process.

Varian H4152001均匀性监测仪  产品展示

视频展示

其他产品

ENTERASYS A4H124-24TX 端口管理交换机
RELIANCE Y-3023-2-H00AA 伺服电机
FOXBORO RH924UQ 电动气动定位器 

英文产品

 KUC755AE117 3BHB005243R0117 Excitation module
 LDSYN-101 3BHE005555R0101 input module
MECS UTX1010 high-precision temperature sensor

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218