Comdel FP2242R2低频匹配网络模块

Comdel FP2242R2低频匹配网络模块  

1.产 品 资 料 介 绍：

Comdel FP2242R2低频匹配网络模块   产品英文介绍

The Comdel FP2242R2 low-frequency matching network module is an impedance matching unit for plasma equipment

1. Fast automatic tuning, real-time compensation for cavity load changes

2. Reduce RF reflection power and protect the front-end RF generator

3. Water cooling and heat dissipation design, stable long-term high-power operation

4. Equipped with fault detection, it can report tuning abnormality alarms

5. Standardized interface, seamlessly integrated with Comdel RF source

1. Model FP2242R2, Comdel Low Frequency Matcher

2. Adapt to low-frequency RF plasma technology

3. Automatic impedance matching adjustment

4. Integrated power and reflection signal acquisition

5. Support remote communication control of the machine

Applicable scenarios

1. Impedance matching of semiconductor etching cavity

2. Dielectric thin film deposition PECVD equipment

3. Plasma surface treatment equipment

4. Vacuum plasma cleaning machine

5. Replacement and maintenance of spare parts for semiconductor equipment

Overall, Comdel FP2242R2 is a specialized matching module for low-frequency plasma processes and a commonly used spare part for semiconductor vacuum production line maintenance

Comdel FP2242R2低频匹配网络模块   产品展示

视频展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218