Newport 35-3700-1425-18晶圆搬运机器人
1.产 品 资 料 介 绍：
Newport 35-3700-1425-18晶圆搬运机器人 产品英文介绍
Colleagues who perform front-end maintenance of AMAT equipment often use the Newport 35-3700-1425-18 wafer handling robot (Kensington multi link manipulator), which is compatible with 300mm wafer EFEM units and is responsible for transferring wafers between FOUP and pre alignment stages and process chambers. It is the core moving component of AMAT equipment front-end transmission.
Product Features
1. Multi link servo structure, smooth high-speed telescopic rotation action, high repeat positioning accuracy, reducing fragment risk
2. Clean grade mechanical design, excellent particle control during the movement process, meeting the 300mm dust-free workshop standard
3. Built in collision detection, will immediately stop when encountering foreign objects, protecting the wafer and arm body
4. Closed loop position feedback, real-time feedback of arm coordinates, ensuring consistent placement and retrieval positions every time
5. Original interface, compatible with AMAT machine control system communication, saving time and effort for on-site disassembly and replacement
Product Specifications
1. Compatible with wafer size of 300mm
2. Multi axis linkage, rotation+telescopic composite motion
3. Clean grade vacuum end picking up wafers
4. Built in absolute position encoder
5. Support sending and receiving instructions and uploading alarm information with the device controller
Application Areas
1. AMAT Semiconductor Equipment EFEM Front End Wafer Loading and Unloading
2.300mm wafer box FOUP to pre alignment table for wafer feeding
3. Front end module wafer transfer for etching and deposition equipment
4. Automatic wafer feeding unit for wafer inspection equipment
5. Repair and replacement of spare parts for Newport Kensington robotic arm
Overall, the Newport 35-3700-1425-18 wafer handling robot is a commonly used multi link robotic arm for EFEM on 300mm production lines, with stable and reliable wafer retrieval. It is also frequently used for replacing front-end handling failures.
Newport 35-3700-1425-18晶圆搬运机器人 产品展示
视频展示
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| AWC 500 | AMAT 0100-51017 | 44308902 |
| AMC 300 | AMAT 0100-90522 | 330878-90-00 |
| ALSTOM V4555724-0100 | AMAT 0100-76088 | 3500/22 146031-01 |
| AGL 400 | AMAT 0100-01714 | CE945GM2A-T25 |
| AGC-4 | AMAT 0100-38018 | GKWE001450R0009 XT382B-R9 |
| AGC 200 | AMAT 0100-00021 | HESG223044R0001 PT8153B-E |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
