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Semitool 250T0025-01升降旋转HD转子

发布时间:2026-09-15人气:
  • Semitool 250T0025-01升降旋转HD转子
  • Semitool 250T0025-01升降旋转HD转子
  • Semitool 250T0025-01升降旋转HD转子

Semitool 250T0025-01升降旋转HD转子 

1.产 品 资 料 介 绍:

Semitool 250T0025-01 升降旋转 HD 转子
产品特点:
1. 集成升降 + 旋转双动作结构,可平稳夹持晶圆完成湿法工艺工位切换
2. 表面抗腐蚀涂层,耐受各类酸碱药液,适配半导体湿法清洗环境
3. 高精度定位轴承,运行抖动小,保证整片晶圆药液喷淋均匀性
4. 内置位置感应反馈,可向机台传递升降旋转到位信号,防止晶圆磕碰
5. 模块化装配结构,现场拆装简单,不用大幅拆解槽体管路
产品参数:
1. 物料型号:250T0025-01
2. 适配晶圆:150mm(6 寸)
3. 驱动方式:气动升降 + 伺服旋转
4. 材质基材:耐蚀特种合金
5. 适配设备:Semitool Equinox 湿法清洗机
应用领域:
1. 半导体 6 寸晶圆单片式湿法清洗工艺承载
2. 晶圆刻蚀后残胶与杂质冲洗工位
3. 晶圆表面化学药液浸润与旋转甩干
4. 湿法槽体晶圆搬运、升降定位动作执行
5.Semitool 清洗机旋转转子备件更换维护
这款 Semitool 250T0025-01 升降旋转 HD 转子是湿法清洗设备的核心运动部件,负责晶圆旋转甩干与工位升降,保障清洗效果稳定,核对型号就可以直接替换上机。

Semitool 250T0025-01升降旋转HD转子  产品英文介绍

Semitool 250T0025-01 lifting and rotating HD rotor

Product Features:

1. Integrated lifting and rotating dual action structure, capable of smoothly clamping wafers to complete wet process station switching

2. Surface corrosion-resistant coating, resistant to various acidic and alkaline liquids, suitable for semiconductor wet cleaning environment

3. High precision positioning bearings with minimal vibration during operation, ensuring uniform spraying of the entire wafer's chemical solution

4. Built in position sensing feedback can transmit lifting and rotating signals to the machine to prevent wafer collision

5. Modular assembly structure, easy on-site disassembly and assembly, no need to extensively dismantle tank pipelines

Product Parameters:

1. Material model: 250T0025-01

2. Compatible wafer: 150mm (6 inches)

3. Drive mode: pneumatic lifting+servo rotation

4. Material substrate: corrosion-resistant special alloy

5. Compatible equipment: Semitool Equinox wet cleaning machine

Application fields:

1. Single wafer wet cleaning process for 6-inch semiconductor wafers

2. Washing station for residual glue and impurities after wafer etching

3. Chemical immersion and spin drying on the wafer surface

4. Execution of wet process wafer handling, lifting and positioning actions

5. Replacement and maintenance of spare parts for Semitool cleaning machine rotating rotor

This Semitool 250T0025-01 lifting and rotating HD rotor is the core moving component of wet cleaning equipment, responsible for wafer rotation, spin drying, and workstation lifting to ensure stable cleaning effect. By checking the model, it can be directly replaced on the machine.

Semitool 250T0025-01升降旋转HD转子  产品展示

250T0025-01.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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