TMP EI-R04MT涡轮分子泵控制器

TMP EI-R04MT涡轮分子泵控制器 

1.产 品 资 料 介 绍：

TMP EI-R04MT涡轮分子泵控制器  产品英文介绍

Shimadzu EI-R04MT Turbomolecular Pump Controller

Product Features:

1. Vector frequency conversion drive, smooth control of magnetic levitation turbo pump acceleration and braking, reducing rotor impact losses

2. Integrated pump body temperature control function, supporting constant temperature setting of pump casing, suitable for long-term semiconductor vacuum process conditions

3. Built in complete fault diagnosis, automatic shutdown protection for overcurrent, overheating, and stall abnormalities, to avoid damage to the pump body

4. Comes with local panel operation and remote contact control, RS232 serial port can upload speed, temperature, and alarm information

5. Standard wiring port, easy to disassemble and ｒｅｐｌａｃｅ on site, compatible with Shimadzu TMP-LM series magnetic levitation molecular pump without changing the wiring

Product Parameters:

1. Material model: EI-R04MT

2. Input power supply: single-phase AC 200~240V, maximum 2.0kVA

3. Communication interface: RS232C serial port, external contact I/O

4. Protection type: overcurrent, overheating, stall, temperature warning protection

5. Compatible pump types: Shimadzu TMP-803LM, 1003LM, 1303LM, 1503LM series magnetic levitation turbo molecular pumps

Application fields:

1. Semiconductor etching cavity magnetic levitation turbo pump drive and constant temperature control

2. Operation monitoring of PVD/CVD high vacuum chamber pump group for thin film deposition

3. Ion implantation equipment vacuum system molecular pump start stop and speed control

4. High vacuum chamber molecular pump matching driver for vacuum analysis instruments

5. Replacement and maintenance of spare parts for Shimadzu magnetic levitation TMP molecular pump controller

This Shimadzu EI-R04MT turbo molecular pump controller is a specialized drive unit for magnetic levitation molecular pumps, which balances speed regulation and pump body temperature management to ensure stable vacuum in the chamber. By checking the model, it can be quickly replaced on the machine.

TMP EI-R04MT涡轮分子泵控制器  产品展示

视频展示

其他产品

TVB6003-1/EIMC 1381-648241-12 电子温控模块
VME-U10B 381-641697-5伺服驱动模块
BENTLY 230025-00 双通道监测器

英文产品

DS200IPCSG1A Interface components
DS200IPCSG2A Interface components
DS200IQXSG1A Industrial electronic card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218