Edwards SCU-A1603C涡轮分子泵控制单元

Edwards SCU-A1603C涡轮分子泵控制单元  

1.产 品 资 料 介 绍：

Edwards SCU-A1603C涡轮分子泵控制单元   产品英文介绍

The Edwards SCU-A1603C turbo molecular pump control unit is used to drive the STP-A1603C magnetic levitation molecular pump, which is commonly used in vacuum equipment.

Product Features

Accurately control the start and stop of the pump body, and smoothly control the acceleration and deceleration.

Real time monitoring of the status of magnetic levitation bearings, and immediate protection for any abnormalities.

Equipped with fault alarm, it is convenient to quickly locate the problem.

Rack installation, easy and convenient replacement of spare parts on site.

Support remote communication, the machine can read operational data.

Product Specifications

Model SCU-A1603C molecular pump controller.

Compatible with STP-A1603C magnetic levitation turbo molecular pump.

Input voltage of 200 to 240 volts AC.

The maximum power consumption is 850VA.

Support serial communication to interface with the upper computer.

Application Areas

High vacuum system control for semiconductor etching equipment.

Molecular pump drive for wafer thin film deposition machine.

Replacement of spare parts for old Edward vacuum unit maintenance.

High vacuum unit of vacuum coating equipment.

Research ultra-high vacuum experimental platform.

This control unit is the core driving component of the magnetic levitation molecular pump, ensuring stable and continuous operation of the molecular pump.

Edwards SCU-A1603C涡轮分子泵控制单元   产品展示

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英文产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218