Edwards PT59-Z1-Z00涡轮分子泵控制器

Edwards PT59-Z1-Z00涡轮分子泵控制器  

1.产 品 资 料 介 绍：

Edwards PT59-Z1-Z00涡轮分子泵控制器   产品英文介绍

The Edwards PT59-Z1-Z00 turbo molecular pump controller is the driving unit for the Edwards matching molecular pump and a commonly used spare part for semiconductor vacuum equipment.

Product Features

Smoothly control the start and stop of the pump body, with a gentle acceleration and deceleration process.

Real time monitoring of bearings and temperature, triggering protection quickly in case of abnormalities.

Comes with fault code prompts for quick on-site troubleshooting.

The body structure is compact, and the disassembly and replacement inside the cabinet are simple.

Support communication output, the machine can read the running status.

Product Specifications

Model PT59-Z1-Z00 molecular pump controller.

Compatible with Edward's corresponding series of turbo molecular pumps.

AC power input, compatible with workshop industrial control power supply.

Built in speed, temperature, and current monitoring circuits.

Support serial communication to interface with the upper control system.

Application Areas

Semiconductor etching machine driven by high vacuum molecular pump.

Vacuum unit control for wafer thin film deposition equipment.

Replacement of spare parts for old Edward vacuum equipment maintenance.

High vacuum unit matching for vacuum coating machine.

Research laboratory ultra-high vacuum experimental platform.

This controller is specifically designed to drive the matching turbo molecular pump, ensuring continuous and stable pumping of the vacuum chamber.

Edwards PT59-Z1-Z00涡轮分子泵控制器   产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218