1.产 品 资 料 介 绍：
PerkinElmer N6658603质谱仪 产品英文介绍
PerkinElmer N6658603 Mass Spectrometer
Product Features
1. High detection sensitivity can capture trace gas components
Strong anti-interference ability, small baseline drift in vacuum environment
3. Fast analysis speed and real-time output of chamber gas data
4. Corrosion resistant structure adapted to corrosive gases in semiconductor processes
5. Simple maintenance, easy troubleshooting, and reduced downtime
Product Specifications
Installation of industrial standard power supply adaptation equipment cabinet
2 wide vacuum pressure detection range covering process conditions
3. Simultaneous identification of multiple components for rapid qualitative and quantitative analysis
4. Support communication output docking with the main control system of the machine
5 built-in vacuum sensing modules ensure stable detection
Application Areas
1. Residual gas monitoring of semiconductor cavity
Analysis of Leakage Detection in Process Chamber 2
Terminal judgment of 3 thin film deposition equipment
4. Vacuum process exhaust gas composition detection
5 Perkin Elmer Mass Spectrometry Equipment Spare Parts Replacement
This PerkinElmer N6658603 mass spectrometer is commonly used for semiconductor vacuum online gas monitoring and is a commonly used spare part for analytical instrument maintenance and replacement
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| 33VM62-100-4 | 3090-SMA-220 | 710-659274-00 |
| 33VM62-028-5 | 3090-SCCT164 | IC3600VORA1 |
| 33VM62-020-20 | 3090-SCCT124 | IC3600VMPA1E |
| 33VM62-000-76 | 3090-SCCT084 | IC3600VMPA1 |
| 33VM62-000-75 | 3090-SCCT083 | IC3600VLEB1A |
| 33VM62-000-21 | 3090-SCCT063 | IC3600VLEA1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
