1.产 品 资 料 介 绍：
AE 3155162-037射频匹配模块 产品英文介绍
AE 3155162-037 RF Matching Module
Product Features
1. Quick automatic tuning response, quickly reducing RF reflection power
2. Low power transmission loss, uniform and stable plasma ignition
3 built-in arc protection, protecting the RF host when the cavity ignites
4 metal shielding structure to resist electromagnetic interference from cabinets
5 modular design, easy disassembly and replacement, time-saving
Product Specifications
1. Used with AE Navigator series RF generator
13.56MHz RF impedance automatic tuning
3. Water cooling and heat dissipation, stable temperature control during high-power and long-term operation
4 built-in sensors provide real-time feedback on matching status
5 original factory standard interfaces, directly connected to RF lines
Application Areas
1. RF impedance matching unit for semiconductor etching equipment
2 PECVD thin film deposition equipment RF matching module
3 Power allocation components for vacuum plasma cleaning equipment
4 Semiconductor Process Chamber Plasma Process Preparation
5 AE Navigator RF Matcher Spare Parts Repair and Replacement
This AE 3155162-037 RF matching module belongs to the Navigator 10013 series matching box and is a commonly used spare part for semiconductor vacuum machine maintenance
AE 3155162-037射频匹配模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
