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Nihon Koshuha AMC-9501G01射频调谐器组件

发布时间:2026-09-24人气:
  • Nihon Koshuha AMC-9501G01射频调谐器组件
  • Nihon Koshuha AMC-9501G01射频调谐器组件
  • Nihon Koshuha AMC-9501G01射频调谐器组件

Nihon Koshuha AMC-9501G01射频调谐器组件  

1.产 品 资 料 介 绍:

Nihon Koshuha AMC-9501G01 射频调谐器组件,日本高周波出品,搭配 TEL 半导体机台,负责自动阻抗匹配。
产品特点
1. 自动调谐速度快,腔体负载变动时快速完成匹配
2. 反射功率控制得很低,射频能量利用率高
3. 自带功率监测,反射过高会触发保护
4. 匹配精度好,保证每次工艺结果稳定
5. 抗干扰能力强,无尘车间环境下稳定工作
6. 耐温抗震,支持机台长时间不间断生产
7. 支持远程通讯,主机能读取调谐状态
8. 内置位置记忆,可快速切换不同工艺参数
9. 结构紧凑,机柜拆装方便,维修省事
10. 内部器件耐用,产线连续运行故障率低
应用领域
1.TEL 系列 CVD 薄膜沉积机台
2. 半导体等离子工艺腔体
3. 晶圆薄膜制备制程
4. 等离子表面处理设备
5. 微波射频工艺配套系统
Nihon Koshuha AMC-9501G01 射频调谐器组件调谐响应快,匹配效果稳定,是 TEL 半导体设备里很关键的射频匹配备件

Nihon Koshuha AMC-9501G01射频调谐器组件  产品英文介绍

Nihon Koshuha AMC-9501G01 RF tuner component, produced by Nippon High Frequency, paired with TEL semiconductor machine, responsible for automatic impedance matching.

Product Features

1. Fast automatic tuning speed, quickly completing matching when the cavity load changes

2. The reflected power is controlled very low, and the utilization efficiency of RF energy is high

3. Equipped with power monitoring, high reflection will trigger protection

4. Good matching accuracy ensures stable process results every time

5. Strong anti-interference ability, stable operation in dust-free workshop environment

6. Temperature and earthquake resistance, supporting long-term uninterrupted production of the machine platform

7. Support remote communication, the host can read the tuning status

8. Built in position memory, can quickly switch between different process parameters

9. Compact structure, easy disassembly and assembly of cabinets, and convenient maintenance

10. Durable internal components and low failure rate during continuous operation of the production line

Application Areas

TEL series CVD thin film deposition machine

2. Semiconductor plasma process chamber

3. Wafer film preparation process

4. Plasma surface treatment equipment

5. Microwave RF process supporting system

Nihon Koshuha AMC-9501G01 RF tuner component has fast tuning response and stable matching effect, making it a key RF matching spare part in TEL semiconductor equipment

Nihon Koshuha AMC-9501G01射频调谐器组件 产品展示

AMC-9501G01.webp (1).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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