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Powerex SF120872PH洁净空气压缩机

发布时间:2026-09-24人气:
  • Powerex SF120872PH洁净空气压缩机
  • Powerex SF120872PH洁净空气压缩机
  • Powerex SF120872PH洁净空气压缩机

Powerex SF120872PH洁净空气压缩机 

1.产 品 资 料 介 绍:

Powerex SF120872PH 洁净空气压缩机,无油涡旋式空压机,专门给半导体无尘车间供给高纯压缩空气。
产品特点
1. 无油涡旋结构,输出空气不含油份,不会污染晶圆
2. 运行震动很小,不会干扰周边精密机台的稳定工艺
3. 噪音低,适合放在洁净车间内部使用
4. 压力输出平稳,供气流量波动小
5. 自带高温、过载保护,异常工况自动停机
6. 运动部件少,日常维护工作量不大
7. 持续满载运行能力强,支持产线全天候供气
8. 内置压力监测,实时反馈供气状态
9. 空气过滤配套完善,粉尘杂质截留效果好
10. 整机结构紧凑,机房占用空间小
应用领域
1. 半导体 EFEM 前端气动执行机构供气
2. 晶圆清洗设备气动阀门气源
3. 刻蚀、沉积机台气动传输单元
4. 洁净实验室工艺用气供给
5. 半导体自动化工装气动驱动系统
Powerex SF120872PH 洁净空气压缩机产出高纯无油压缩空气,供气稳定,是半导体产线气动系统的核心气源设备。

Powerex SF120872PH洁净空气压缩机  产品英文介绍

Powerex SF120872PH clean air compressor, oil-free vortex air compressor, specifically designed to supply high-purity compressed air to semiconductor dust-free workshops.

Product Features

1. Oil free vortex structure, outputting air without oil content, will not pollute the wafer

2. The operation vibration is minimal and will not interfere with the stable process of surrounding precision machines

3. Low noise, suitable for use inside clean workshops

4. Stable pressure output and minimal fluctuations in gas supply flow rate

5. Equipped with high temperature and overload protection, automatic shutdown under abnormal working conditions

6. There are few moving parts, and the daily maintenance workload is not large

7. Strong continuous full load operation capability, supporting all-weather gas supply for production lines

8. Built in pressure monitoring, real-time feedback on gas supply status

9. The air filtration system is well-equipped, with good dust and impurity retention effect

10. The whole machine has a compact structure and occupies a small space in the computer room

Application Areas

1. Gas supply for semiconductor EFEM front-end pneumatic actuator

2. Pneumatic valve air source for wafer cleaning equipment

3. Pneumatic transmission unit for etching and deposition machines

4. Clean laboratory process gas supply

5. Pneumatic drive system for semiconductor automation equipment

The Powerex SF120872PH clean air compressor produces high-purity oil-free compressed air with stable supply, and is the core gas source equipment for the pneumatic system of semiconductor production lines.

Powerex SF120872PH洁净空气压缩机 产品展示

SF120872PH.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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