1.产 品 资 料 介 绍：
AE 3155999-080射频匹配组件 产品英文介绍
AE 3155999-080 RF matching component, AE automatic impedance matching unit, used to match the impedance of the process chamber and efficiently deliver RF power into the plasma chamber.
Product Features
1. Adaptive tuning logic, quickly locking the matching point when the cavity impedance suddenly changes
2. Built in directional coupling sampling, real-time acquisition of forward and reflected RF power
3. The arc detection is sensitive, and the power protection of the RF source is reduced when the cavity ignites
4. The capacitor motor drives smoothly and is not easily stuck after long-term repeated tuning
5. Water cooling and heat dissipation design, high-power continuous operation with controllable temperature rise
6. Communication interface compatible with AMAT machine, bidirectional transmission of matching status information
7. Wide tunable range, supporting switching between multiple process formulas
8. The RF circuit shielding on the cavity side is well done to reduce external electromagnetic radiation
9. Equipped with parameter storage, the preset formula can be quickly retrieved after changing the cavity
10. The internal components have undergone aging screening, resulting in a low failure rate under mass production conditions
Application Areas
11. AMAT plasma etching process chamber
12. PVD thin film deposition RF circuit
13. Plasma surface modification treatment of wafers
14. Semiconductor dry adhesive removal equipment
15. High power RF plasma process system
AE 3155999-080 RF matching component has sensitive arc protection and a wide tuning range, making it a core supporting spare part for RF links in semiconductor plasma processes.
AE 3155999-080射频匹配组件 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
