1.产 品 资 料 介 绍：
AE 3155094-003 A射频匹配模块 产品英文介绍
AE 3155094-003 A RF matching module
This AE 3155094-003 A RF matching module is used for semiconductor plasma equipment, responsible for RF impedance matching to reduce reflected power
Product Features
Fixed impedance matching design suitable for 13.56MHz RF circuit
Reduce reflection power and stabilize plasma state
Strong tolerance to cavity process fluctuations
Adapt to AMAT equipment installation structure
Metal cavity protection is suitable for use in clean workshops
Application Areas
Semiconductor etching process equipment
Thin film deposition PVD equipment
PECVD plasma equipment
Wafer plasma cleaning equipment
Integrated Circuit Manufacturing Production Line
Storage chip processing equipment
Compound semiconductor process equipment
Replacement of spare parts for semiconductor equipment
Plasma surface treatment equipment
Semiconductor Process Testing Platform
All types of plasma process equipment can use AE 3155094-003 A RF matching module to ensure stable RF output and ensure semiconductor process consistency
视频展示
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| PMB31B-10216-01 | IMDSI22 | PFTL101BE 5.0KN |
| PMB31B-10216-00 | NIMF02 | 3BSE019999R1 DSRF 197K01 |
| PMB31B-10214-03 | NKLS111 | M21NRXC-LSS-NS-03 |
| PMB31B-10214-02 | NRI002 | 57160001-DL DSDI 302 |
| PMB31B-10214-01 | AMAT 0100-03267 | 57160001-BN DSTD 151 |
| PMB31B-10214-00 | NTAI05 | M22NRXC-LDN-M1-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
