1.产 品 资 料 介 绍：
AE VM1500AW射频匹配器 产品英文介绍
AE VM1500AW RF Matcher
This AE VM1500AW RF matching device is used in semiconductor plasma equipment to automatically complete impedance matching and reduce RF reflection power
Product Features
Automatic fast tuning and stable plasma output
Suitable for 13.56MHz RF high-power operating conditions
Water cooling for long-term continuous operation and reliable heat dissipation
Equipped with power monitoring and fault alarm functions
Standard cabinet installation compatible with mainstream vacuum equipment
Application Areas
Semiconductor etching process equipment
PECVD thin film deposition equipment
Magnetron Sputtering PVD Equipment
Wafer plasma cleaning equipment
Integrated Circuit Manufacturing Production Line
Storage chip processing equipment
Compound semiconductor process equipment
Plasma surface treatment equipment
Replacement of spare parts for semiconductor equipment
Plasma process research and development testing platform
All types of plasma process equipment can use AE VM1500AW RF matching device to stabilize RF energy output and ensure process consistency
AE VM1500AW射频匹配器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
