1.产 品 资 料 介 绍：
Seren 9600610000射频电源模块 产品英文介绍
Seren 9600610000 RF power module
This Seren 9600610000 RF power module belongs to the semiconductor plasma process RF generator, which outputs stable RF energy for thin film and etching processes
Product Features
Stable output power adapted to mainstream process frequency of 13.56MHz
Built in power closed-loop control reduces process fluctuations
Comes with multiple protections against overvoltage, overcurrent, and overheating
Support external communication for easy access to device control
Rack mounted structure suitable for clean workshop cabinet installation
Application Areas
Semiconductor dry etching equipment
Magnetron sputtering coating equipment
PECVD thin film deposition production line
Wafer plasma cleaning equipment
Compound semiconductor process equipment
Integrated Circuit Manufacturing Production Line
Plasma surface modification equipment
Replacement of spare parts for semiconductor equipment
Optical thin film preparation equipment
Plasma process research and development testing platform
Seren 9600610000 RF power module can be selected for various plasma process equipment to ensure stable output RF power and process consistency
视频展示
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| PMA43Q-Y0100-02 | AMAT 0100-90554 | PFTL101B-10KN 3BSE004197R1 |
| PMA43Q-10100-00 | NKTU116 | PFTL101AER-0.5KN 3BSE023010R1 |
| PMA43Q-00100-00 | 07AA63 | PFTL101B 50KN |
| PMA43P-11100-00 | ICSO16N1 | PFTL-101B 5KN 3BSE00418SR1 |
| PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
| PMA43P-00100-00 | IMMFP12 | PFTL101AE-0.5 3BSE004211R1 0.5 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
