VAT 210760 641PM-16PL-0003/060压力控制器

VAT 210760 641PM-16PL-0003/060压力控制器 

1.产 品 资 料 介 绍：

VAT 210760 641PM-16PL-0003/060压力控制器 产品英文介绍

VAT 210760 641PM-16PL-0003/060 is a VAT vacuum pressure controller, compatible with a vacuum throttle valve, used for closed-loop control of semiconductor cavity vacuum pressure.

Product Features

1. High precision vacuum pressure control and fast response speed

2. Adapt to VAT servo vacuum valve, accurately adjust valve opening

3. Support multiple pressure sensor signal inputs

4. Equipped with communication interface, able to interface with the main control system of the equipment

5. Industrial stable design, suitable for long-term operation of clean vacuum processes

Application Fields

1. Vacuum pressure control of semiconductor etching chamber

2. Pressure regulation of PVD/CVD vacuum chamber for thin film deposition

3. Vacuum process control of plasma cleaning equipment

4. Vacuum system matching for wafer processing equipment

5. Replacement and maintenance of spare parts for VAT controllers in semiconductor production lines

6. Pressure closed-loop control of vacuum coating equipment

7. Control of Material Surface Treatment Vacuum Equipment

8. Pressure control of research vacuum experimental equipment

9. Plasma vacuum process for display panel

10. Renovation project for old vacuum process equipment

VAT 210760 641PM-16PL-0003/060 is a commonly used spare part for semiconductor vacuum equipment for stable control of chamber vacuum.

VAT 210760 641PM-16PL-0003/060压力控制器 产品展示

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英文产品

Honeywell 8C-PAIHA1 Switch output module
HONEYWELL FS-SAI-1620M Switch input module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218