1.产 品 资 料 介 绍：
TEL BB87-002909射频匹配单元 产品英文介绍
TEL BB87-002909 is an RF matching unit for Tokyo Electronic Semiconductor Equipment, which automatically adjusts impedance, reduces RF reflection power, and stabilizes plasma discharge.
Product Features
1. Dynamic automatic impedance matching to reduce RF echoes
2. Fast response speed, adaptable to changes in plasma load
3. Equipped with arc pulling, overload protection, and protection against RF power supply
4. Original integrated structure, can directly replace spare parts
5. Suitable for vacuum clean chambers, suitable for long-term process operation
Application Fields
1. RF impedance matching of semiconductor etching cavity
2. RF circuit matching for PVD thin film deposition equipment
3. RF system adjustment of plasma cleaning equipment
4. Plasma process matching for wafer processing chamber
5. Maintenance and replacement of TEL equipment RF matching unit
6. Impedance matching of vacuum coating plasma process
7. Use of plasma surface treatment equipment for materials
8. RF matching of research plasma experimental equipment
9. Display panel plasma process matching
10. Renovation of old semiconductor plasma equipment
TEL BB87-002909 matches RF circuit impedance to ensure stable plasma process and is a commonly used spare part for semiconductor equipment
视频展示
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| ICS TRIPLEX T3401 | SR06000-000000 | 133323-01 |
| ICS TRIPLEX T3310 | PSR3-23050-01-003 | 6DD1688-1AC0 |
| ICS TRIPLEX T3300 | PWA-01-022136-0002 | 6ES5373-0AA61 |
| ICS TRIPLEX T3160 | DMC-50720-EXT-24V | 6DD1842-0AD1 |
| ICS TRIPLEX T3151 | S60600-NA | 6ES5355-3UA11 |
| ICS TRIPLEX T3150A | S60301-NA | 6ES5340-3KA21 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
