Pfeiffer vacuum 3870-07100空气辅助闸阀
1.产 品 资 料 介 绍：
Pfeiffer vacuum 3870-07100空气辅助闸阀 产品英文介绍
Pfeiffer vacuum 3870-07100 air assisted gate valve
Product Features
Pneumatic air assisted valve opening and closing response is rapid and has high conductivity
Stainless steel valve body has excellent sealing performance and low leakage rate, meeting high vacuum working conditions
Integrated position feedback switch provides real-time feedback on the open and closed status of the valve
Compact valve body structure, direct installation of pipelines, occupying space, and layout of vacuum pipelines
Elastic seals are resistant to various process gases and compatible with semiconductor clean processes
Product application areas
Vacuum pipeline isolation for semiconductor etching equipment
Thin film deposition PVD CVD vacuum chamber
Wafer transfer airlock partition unit
On/off control of vacuum coating equipment pipeline
Laboratory ultra-high vacuum testing platform
Plasma cleaning equipment vacuum system
Optical component vacuum processing equipment
Vacuum leak detection system pipeline isolation device
Material surface modification vacuum equipment
Front end isolation valve of semiconductor vacuum pump group
Product Specifications
Drive Method: Compressed Air Pneumatic Auxiliary Drive
Valve body material: stainless steel main structure
Suitable for high vacuum working conditions with high vacuum level
Pfeiffer vacuum 3870-07100 air assisted gate valve, as a vacuum pipeline isolation component, is responsible for isolating the air path between the vacuum chamber and the pump unit to maintain the sealing and stability of the vacuum system
Pfeiffer vacuum 3870-07100空气辅助闸阀 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
