1.产 品 资 料 介 绍：
TEL BB87-004612-11控制器 产品英文介绍
The TEL BB87-004612-11 controller is a dedicated main control component for Tokyo Electronic Semiconductor Equipment, responsible for wafer process operation scheduling signal calculation and coordinated control of equipment components, adapting to the stable operation of TEL's original semiconductor process equipment
Product Features
High speed processing of multi-channel process instructions ensures precise timing of wafer processing actions
Built in multiple hardware security protections, quick shutdown protection triggered by abnormal working conditions
Strong anti-interference board level design, suitable for complex electromagnetic environments in semiconductor workshops
Modular integrated structure, easy disassembly and replacement of spare parts, reducing downtime
Real time collection of device status information, convenient for operation and maintenance to quickly locate fault points
Application Fields
Main control unit of semiconductor etching equipment
Wafer cleaning equipment control system
Signal controller for thin film deposition equipment
Electronic control module of ion implantation equipment
Semiconductor lithography supporting equipment
Wafer debonding process equipment
Semiconductor oxidation diffusion equipment
Precision wafer inspection equipment
Semiconductor wet process equipment
Microelectronics processing automation equipment
Product Specifications
Suitable for dedicated DC power supply for semiconductor equipment cabinets
Can operate continuously for a long time in a dust-free cabinet environment
Compatible with TEL devices' internal dedicated high-speed communication bus
TEL BB87-004612-11 controller, as the core control spare part of semiconductor process equipment, coordinates the overall process flow and signal interaction of the whole machine, and is widely used in various precision process equipment for wafer manufacturing
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
