1.产 品 资 料 介 绍：
TEL 2L81-050009-14主控板卡 产品英文介绍
The TEL 2L81-050009-14 main control board is the core control unit of Tokyo Electronic Semiconductor Equipment, responsible for process logic scheduling, parameter acquisition, and multi submodule communication and coordination, suitable for cleanroom precision process scenarios. Its application areas are as follows:
1. Main control system of semiconductor etching equipment
2. CVD thin film deposition process equipment
3. ALD atomic layer deposition host
4. Wafer coating and development track equipment
5. Wet cleaning process control platform
6. Vacuum heat treatment process equipment
7. Wafer handling robot control system
8. Ion implantation supporting measurement and control unit
9. Semiconductor oxidation diffusion equipment
10. Wafer debonding and ashing equipment
11. Lithography supporting process control device
12. Semiconductor equipment automation testing bench
13. Linkage control of wafer inspection equipment
14. Special film material preparation equipment
15. Semiconductor production line MES docking control terminal
TEL 2L81-050009-14 main control board has fast response speed and high process control accuracy. It can stably control key process parameters such as pressure, temperature, and gas flow under high cleanliness and strong vacuum conditions
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| PC843-XYZ-T |  6SC6140-0FE01 | MC-GAIH22 |
| PC843-XYZ-N | 6SC6500-0UC01 | MC-PDOX02 |
| PC843-XYZ-F | 6SC6100-0GA00 | NTDI01 |
| PC843-XYZ-A | 6SC6120-0FE00 | NKTT01-3 |
| PC843-001-T | 6SC6101-2B-Z | HESG447433R0001 70BV05A-ES |
| PC843-001-N | 6SC6100-0GA11 | HESG446933R0002 70AB02B-E |
| PC843-001-F | 6SC6140-0FE00 | NTAI06 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
