KLA Tencor 0312143-000电源模块

KLA-Tencor 0312143-000电源模块

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 0312143-000 是一款高功率电源模块，通常被称为 X-Y Stage High Power Amp Board（高功率放大器板），广泛应用于 KLA Tencor 的高端半导体晶圆检测与计量设备中，尤其用于控制精密的 X-Y 运动平台。

一、产品功能简介

• 主要作用：为 X-Y 运动平台提供大功率驱动电流，实现晶圆在检测平台上的高精度、快速移动。

• 应用类型：电源放大器，通常为伺服或步进电机系统提供放大后的控制信号。

• 硬件架构：板卡形式，可能集成在大型检测系统的电源与运动控制单元内。

二、典型应用领域

1. 晶圆缺陷检测系统（如 Surfscan、SP 系列）

• 控制扫描平台精密移动，实现晶圆从中心到边缘的全面光学检测；

• 保证运动平稳无抖动，对微米/纳米级缺陷实现精准识别。

2. 精密 X-Y 机械平台控制

• 用于晶圆表面或器件层图形检测中的平台对位；

• 提供高速响应、高稳定度的直线移动能力。

3. 光学对位系统

• 驱动对位平台实现图像采集部件的精确位置调整；

• 关键用于确保多层晶圆图案的叠对精度。

4. 自动化晶圆搬送系统

• 在需要高可靠性和精确路径控制的场合，驱动平台或机械臂移动晶圆；

• 特别适合 300mm 晶圆的高速搬运系统。

三、技术特性

英文资料：

KLA Tencor 0312143-000 is a high-power power module, commonly known as the X-Y Stage High Power Amp Board, widely used in KLA Tencor's high-end semiconductor wafer inspection and metrology equipment, especially for controlling precision X-Y motion platforms.

1、 Product Function Introduction

Main function: Provide high-power driving current for the X-Y motion platform, achieving high-precision and fast movement of wafers on the detection platform.

Application type: Power amplifier, usually providing amplified control signals for servo or stepper motor systems.

Hardware architecture: In the form of a board, it may be integrated into the power and motion control units of large detection systems.

2、 Typical application areas

1. Wafer defect detection system (such as Surfscan, SP series)

Control the precise movement of the scanning platform to achieve comprehensive optical inspection of the wafer from the center to the edge;

Ensure smooth and vibration free movement, and achieve precise identification of micro/nano level defects.

2. Precision X-Y mechanical platform control

Used for platform alignment in wafer surface or device layer pattern detection;

Provide high-speed response and high stability linear movement capability.

3. Optical alignment system

Drive the alignment platform to achieve precise position adjustment of image acquisition components;

The key is to ensure the stacking accuracy of multi-layer wafer patterns.

4. Automated wafer handling system

In situations where high reliability and precise path control are required, drive the platform or robotic arm to move the wafer;

Specially suitable for high-speed handling systems of 300mm wafers.

3、 Technical characteristics

Project Description

Control type X-Y dual axis high-power drive

Output capability suitable for servo motor drive, with high response speed

Feedback support supports closed-loop control and is compatible with high-resolution encoder feedback

System architecture board card design, easy to modularize integration and maintenance

Equipment compatibility for use with KLA Tencor wafer inspection equipment

2.产      品      展      示      

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