KLA Tencor 0085225-000电路板

KLA-Tencor 0085225-000电路板 

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 0085225-000 是一款用于风扇过滤单元（FFU）的电子诊断控制电路板，通常用于 KLA Tencor 晶圆检测和计量设备中，是保障洁净环境下设备稳定运行的重要部件。

一、产品功能

• 电子诊断：用于监控 FFU 的运行状态，包括风扇转速、电流、电压等参数。

• 故障检测：提供自诊断功能，及时检测和报告 FFU 异常情况。

• 环境控制：通过调节风扇运行状态，帮助设备维持符合标准的洁净环境。

二、典型应用领域

• 半导体制造：用于晶圆表面缺陷检测和计量系统中，保障检测过程不受空气微粒污染影响。

• 洁净室设备：广泛应用于需要稳定空气流通和颗粒控制的系统中，确保高精度工艺环境。

• 晶圆工艺控制设备：用于控制和监测设备内部空气质量，提升系统运行稳定性和设备寿命。

三、适用设备

常用于 KLA Tencor Surfscan 系列、SP 系列等高端晶圆检测系统中的 FFU 控制模块。

总结

KLA Tencor 0085225-000 电路板作为 FFU 系统的电子控制和诊断核心，广泛服务于半导体制造和高洁净度要求的检测设备中，对于确保检测准确性与系统可靠性至关重要。更换与维护此类电路板建议由专业工程技术人员进行操作。

英文资料：

KLA Tencor 0085225-000 is an electronic diagnostic control circuit board used for fan filter units (FFUs), typically used in KLA Tencor wafer inspection and metrology equipment. It is an important component to ensure stable operation of equipment in clean environments.

1、 Product Features

Electronic diagnosis: used to monitor the operating status of FFU, including parameters such as fan speed, current, voltage, etc.

Fault detection: Provides self diagnostic function to promptly detect and report abnormal FFU situations.

Environmental control: By adjusting the operation status of the fan, it helps the equipment maintain a clean environment that meets standards.

2、 Typical application areas

Semiconductor manufacturing: used in wafer surface defect detection and measurement systems to ensure that the detection process is not affected by air particle pollution.

Cleanroom equipment: widely used in systems that require stable air circulation and particle control to ensure high-precision process environments.

Wafer process control equipment: used to control and monitor the internal air quality of equipment, improve system operation stability and equipment lifespan.

3、 Applicable equipment

FFU control module commonly used in high-end wafer inspection systems such as KLA Tencor Surfscan series and SP series.

summarize

The KLA Tencor 0085225-000 circuit board, as the electronic control and diagnostic core of FFU systems, is widely used in semiconductor manufacturing and testing equipment with high cleanliness requirements. It is crucial to ensure testing accuracy and system reliability. It is recommended that the replacement and maintenance of such circuit boards be carried out by professional engineering and technical personnel.

2.产      品      展      示      

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