KLA Tencor 073-800707-00驱动器板

KLA-Tencor  073-800707-00驱动器板

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 073-800707-00 驱动器板是一种高精度电路控制组件，主要用于晶圆测试设备中探针台系统的运动控制和驱动管理。它广泛应用于 KLA Tencor 的 Lightning 1200 系列等晶圆探针台系统。

一、产品功能

• 运动控制驱动：用于精确控制探针台在 X、Y、Z 三轴方向的定位运动。

• 电机驱动接口：驱动伺服电机或步进电机执行精准移动任务。

• 自动化信号响应：响应主控系统的指令，执行定位、测试点对准等关键操作。

二、产品应用领域

1. 晶圆探针测试系统
   应用于晶圆制造环节中的电学测试阶段，确保芯片在晶圆上的各项电气性能达标。

2. 自动化检测设备
   配合其他模块执行高精度对位、取样、检测任务，提高测试自动化程度。

3. 半导体制造工艺控制
   用于精密运动控制模块中，实现工艺参数采集前的精确探针定位。

三、典型特性

• 设备适用性：专为 KLA Tencor 晶圆检测和探针台设备设计。

• 控制精度高：满足半导体设备对纳米级精度的驱动需求。

• 稳定性强：具备抗干扰能力，适合连续运行的半导体工厂环境。

四、总结

KLA Tencor 073-800707-00 驱动器板是实现晶圆自动化测试流程中的关键组件，负责驱动探针台高精度移动，是确保设备检测精度与生产效率的核心部件之一。适用于需要高稳定性、高重复性控制场景的半导体制造和测试设备中。

英文资料：

The KLA Tencor 073-800707-00 driver board is a high-precision circuit control component mainly used for motion control and drive management of probe station systems in wafer testing equipment. It is widely used in wafer probe station systems such as KLA Tencor's Lightning 1200 series.

1、 Product Features

Motion control drive: used for precise control of the positioning motion of the probe station in the X, Y, and Z axes.

Motor drive interface: drives servo motors or stepper motors to perform precise movement tasks.

Automated signal response: Responding to instructions from the main control system, performing key operations such as positioning and aligning test points.

2、 Product application areas

Wafer probe testing system

Applied in the electrical testing stage of wafer manufacturing to ensure that the electrical performance of the chip on the wafer meets the standards.

Automated testing equipment

Collaborate with other modules to perform high-precision alignment, sampling, and testing tasks, improving the level of testing automation.

Semiconductor Manufacturing Process Control

Used in precision motion control modules to achieve precise probe positioning before process parameter acquisition.

3、 Typical characteristics

Equipment Applicability: Designed specifically for KLA Tencor wafer inspection and probe station equipment.

High control accuracy: meets the driving requirements of semiconductor devices for nanometer level precision.

Strong stability: It has anti-interference ability and is suitable for continuous operation in semiconductor factory environments.

4、 Summary

The KLA Tencor 073-800707-00 driver board is a key component in the automated wafer testing process, responsible for driving the probe stage to move with high precision. It is one of the core components to ensure equipment detection accuracy and production efficiency. Suitable for semiconductor manufacturing and testing equipment that require high stability and high repeatability control scenarios.

2.产      品      展      示      

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