KLA Tencor 073-650043-00控制器板

KLA-Tencor  073-650043-00控制器板

1.产 品 资 料 介 绍：

中文资料：

KLA-Tencor 073-650043-00 控制器板是一种专用于半导体检测设备的电子控制模块，主要用于控制与协调系统中关键部件的运行。其主要应用领域如下：

1. 晶圆检测设备
   此控制器板广泛用于 KLA-Tencor 的晶圆缺陷检测设备（如 KLA 2132 系列），用于执行扫描、图像采集、数据处理等功能的控制任务，是晶圆制造过程中关键的工艺监测工具。

2. 电子束检测系统
   在电子束检测设备中，控制器板负责电子束路径、聚焦模块、扫描区域和采样策略的控制，支持亚微米级别的缺陷检测。

3. 自动化设备执行单元控制
   控制器板用于协调电机驱动、定位平台、传感器和反馈系统，实现设备的高精度移动与控制。

4. 光学成像系统控制
   在某些检测设备中，该板卡可能还承担光源控制、图像传感器同步与采集、信号调理等任务，用于实现高分辨率图像的获取与分析。

5. 半导体制造过程质量控制
   控制器板为检测系统提供实时响应与系统自检能力，支持工艺偏差分析、设备健康评估及异常识别，是确保产品一致性与良率控制的重要手段。

6. 维修与备件应用
   该型号控制器板也常用于设备的维护与故障恢复，是KLA-Tencor系统中的常见替换部件。

综上，KLA-Tencor 073-650043-00 控制器板广泛应用于晶圆制造、微电子器件质量控制、先进封装检测等高精度、高可靠性的半导体工艺控制场景中，是设备自动化与智能化运行的核心部件之一。

英文资料：

The KLA Tencor 073-650043-00 controller board is an electronic control module specifically designed for semiconductor testing equipment, mainly used to control and coordinate the operation of key components in the system. Its main application areas are as follows:

Wafer inspection equipment

This controller board is widely used in KLA Tencor's wafer defect detection equipment (such as the KLA 2132 series) to perform control tasks such as scanning, image acquisition, and data processing. It is a key process monitoring tool in the wafer manufacturing process.

Electron beam detection system

In electron beam inspection equipment, the controller board is responsible for controlling the electron beam path, focusing module, scanning area, and sampling strategy, supporting sub micron level defect detection.

Automated equipment execution unit control

The controller board is used to coordinate the motor drive, positioning platform, sensors, and feedback system, achieving high-precision movement and control of the equipment.

Optical imaging system control

In some detection devices, the board may also undertake tasks such as light source control, image sensor synchronization and acquisition, signal conditioning, etc., to achieve high-resolution image acquisition and analysis.

Quality Control in Semiconductor Manufacturing Process

The controller board provides real-time response and system self checking capabilities for the detection system, supports process deviation analysis, equipment health assessment, and anomaly identification, and is an important means to ensure product consistency and yield control.

Maintenance and spare parts application

This model of controller board is also commonly used for equipment maintenance and fault recovery, and is a common replacement component in KLA Tencor systems.

In summary, the KLA Tencor 073-650043-00 controller board is widely used in high-precision and high reliability semiconductor process control scenarios such as wafer manufacturing, microelectronic device quality control, and advanced packaging inspection. It is one of the core components for equipment automation and intelligent operation.

2.产      品      展      示      

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