KLA Tencor 0061386-004背板

KLA-Tencor  0061386-004背板

1.产 品 资 料 介 绍：

中文资料：

KLA-Tencor 0061386-004 背板（Backplane）是半导体检测设备中的核心连接组件，其主要应用领域集中在以下几个方面：

1. 晶圆检测与计量系统

该背板广泛用于 KLA-Tencor 的晶圆检测设备中，作为多个控制模块、处理板卡、执行单元间的互联平台，常见于以下设备类型：

• 缺陷检测设备（如 KLA 2132/2350/2810 系列）

• 光学计量系统

• 电子束检测设备

2. 系统内部信号与电源分配

背板负责以下关键功能：

• 各种功能板卡的电源分配（DC电源）

• 高速信号总线连接（如数据通信、时钟信号）

• 控制命令及状态信息的总线传输

• 板卡间的同步协调

3. 模块化系统架构的基础平台

在模块化系统设计中，背板作为系统骨干平台，可插拔多个子模块，如：

• 图像处理板

• 控制器板（如 073-650043-00）

• 接口/通信板（如 RS-232、GPIB、Ethernet 等）

• 扫描控制和聚焦电路板

这使得设备具备良好的可维护性和可扩展性。

4. 高可靠性设备运行保障

该背板采用工业级高可靠性设计，适用于 24/7 连续运行的晶圆厂环境，有助于：

• 降低系统故障率

• 提高模块间通信的稳定性

• 保证系统长期运行一致性

英文资料：

KLA Tencor 0061386-004 Backplane is the core connecting component in semiconductor testing equipment, and its main application areas are concentrated in the following aspects:

1. Wafer inspection and measurement system

This backplane is widely used in KLA Tencor wafer inspection equipment as an interconnection platform between multiple control modules, processing boards, and execution units. It is commonly used in the following equipment types:

Defect detection equipment (such as KLA 2132/2350/2810 series)

Optical metrology system

Electron beam detection equipment

2. Internal signal and power distribution within the system

The backplane is responsible for the following key functions:

Power distribution of various functional boards (DC power supply)

High speed signal bus connection (such as data communication, clock signal)

Bus transmission of control commands and status information

Synchronization and coordination between boards

3. Basic platform for modular system architecture

In modular system design, the backplane serves as the backbone platform of the system and can plug in multiple submodules, such as:

Image processing board

Controller board (such as 073-650043-00)

Interface/communication board (such as RS-232, GPIB, Ethernet, etc.)

Scan control and focusing circuit board

This enables the device to have good maintainability and scalability.

4. High reliability equipment operation guarantee

This backplane adopts an industrial grade high reliability design, suitable for 24/7 continuous operation in wafer fab environments, which helps to:

Reduce system failure rate

Improve the stability of communication between modules

Ensure long-term consistency of system operation

2.产      品      展      示      

3.其他产品

ASEA DSQC108 controller backplane

RADISYS 061-05927-0031 adapter module

Siemens 6ES7291-8GC00-0XA0 cartridge

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