KLA Tencor 710-805000-50控制器板

KLA-Tencor  710-805000-50控制器板

1.产 品 资 料 介 绍：

中文资料：

KLA-Tencor 710-805000-50 控制器板是应用于半导体制造设备中的高性能控制模块，主要用于支持复杂检测与测量设备的核心控制任务。其产品应用领域如下：

1. 晶圆缺陷检测系统

该控制器板广泛用于 KLA-Tencor 的高端晶圆检测设备中（如 e-beam 或光学扫描系统），负责协调扫描器、图像处理器、光源控制器等关键部件的运行。

2. 电子束检测与图像处理系统

在电子束（e-beam）检测设备中，710-805000-50 控制器板用于：

• 控制电子束的加速、聚焦与偏转

• 管理图像采集与处理信号

• 与主系统进行高速通信同步

3. 自动化精密控制平台

控制器板控制设备的自动化执行模块，包括：

• 精密电机驱动器（移动平台、光学头等）

• 高速数据采集接口

• 实时反馈回路的调节（如闭环控制系统）

4. 系统集成与数据协调

该控制器板作为主控板或分控板，管理多个功能模块之间的通信协调，确保系统：

• 实时性

• 高速数据吞吐

• 多模块协同工作（如控制 + 图像 + 扫描）

5. 晶圆制造过程控制

作为 KLA 设备中不可或缺的模块，该控制器板应用于：

• 晶圆表面工艺质量检测

• 微粒污染分析

• 工艺偏差监控与制程优化

英文资料：

The KLA Tencor 710-805000-50 controller board is a high-performance control module applied in semiconductor manufacturing equipment, mainly used to support the core control tasks of complex detection and measurement equipment. The application areas of its products are as follows:

1. Wafer defect detection system

This controller board is widely used in high-end wafer inspection equipment of KLA Tencor (such as e-beams or optical scanning systems), responsible for coordinating the operation of key components such as scanners, image processors, and light source controllers.

2. Electron beam detection and image processing system

In electron beam (e-beam) detection equipment, the 710-805000-50 controller board is used for:

Control the acceleration, focusing, and deflection of the electron beam

Manage image acquisition and signal processing

Synchronize high-speed communication with the main system

3. Automated precision control platform

The controller board controls the automation execution module of the equipment, including:

Precision motor driver (mobile platform, optical head, etc.)

High speed data acquisition interface

Adjustment of real-time feedback loop (such as closed-loop control system)

4. System integration and data coordination

This controller board serves as the main control board or sub control board, managing communication and coordination between multiple functional modules to ensure that the system:

real-time

High speed data throughput

Multi module collaborative work (such as control+image+scanning)

5. Wafer manufacturing process control

As an essential module in KLA equipment, this controller board is used for:

Surface process quality inspection of wafers

Particle pollution analysis

Process Deviation Monitoring and Process Optimization

2.产      品      展      示      

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