KLA Tencor 710-657600-20控制板

KLA-Tencor  710-657600-20控制板

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 710-657600-20 控制板是一种关键的自动对焦控制模块，广泛应用于 KLA Tencor 21XX 系列晶圆检测设备中，如 2132、2135、2138 和 2139 型号。这类设备用于半导体制造流程中的光学检测与质量控制。

主要应用领域：

1. 自动对焦系统控制
   控制板用于精确驱动和调节检测设备的自动对焦机构，确保在不同晶圆高度和图案复杂度下实现快速、精准聚焦。

2. 图像获取与质量保障
   自动对焦能力对图像采集质量至关重要，控制板通过反馈控制系统动态调节镜头位置，使设备获得清晰图像以供后续分析。

3. 半导体缺陷检测
   应用于关键缺陷检测环节，如图案偏移、线宽不一致、颗粒污染等，控制板支持系统稳定运行，为判别算法提供准确图像输入。

4. 设备整体系统协调
   作为内部通信和执行模块的一部分，该控制板与其他电子系统协同工作，参与数据交换和系统控制逻辑，实现设备整体性能的优化。

5. 系统兼容性与升级
   该控制板设计具有良好的模块化特性，支持设备维护、替换与升级，提升生产线灵活性和可靠性。

核心特性：

• 型号：710-657600-20

• 功能：自动对焦控制、图像调焦、系统通信协调

• 应用设备：KLA Tencor 21XX 系列晶圆检测设备

• 特点：高稳定性、高精度控制、快速响应

英文资料：

The KLA Tencor 710-65760-20 control board is a critical autofocus control module widely used in the KLA Tencor 21XX series wafer inspection equipment, such as models 2132, 2135, 2138, and 2139. This type of equipment is used for optical inspection and quality control in semiconductor manufacturing processes.

Main application areas:

Autofocus system control

The control board is used to precisely drive and adjust the autofocus mechanism of the detection equipment, ensuring fast and accurate focusing at different wafer heights and pattern complexities.

Image acquisition and quality assurance

The autofocus capability is crucial for the quality of image acquisition. The control board dynamically adjusts the lens position through feedback control system, enabling the device to obtain clear images for subsequent analysis.

Semiconductor defect detection

Applied to critical defect detection processes such as pattern deviation, inconsistent line width, particle contamination, etc., the control board supports stable system operation and provides accurate image input for the discrimination algorithm.

Overall system coordination of equipment

As part of the internal communication and execution module, this control board works in conjunction with other electronic systems, participating in data exchange and system control logic to optimize the overall performance of the equipment.

System compatibility and upgrade

The control board design has good modular characteristics, supports equipment maintenance, replacement, and upgrading, and enhances the flexibility and reliability of the production line.

Core features:

Model: 710-65760-20

Function: Auto focus control, image focusing, system communication coordination

Application equipment: KLA Tencor 21XX series wafer inspection equipment

Features: High stability, high-precision control, fast response

2.产      品      展      示      

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