KLA-Tencor 710-663106-001单轴控制器
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-663106-001 单轴控制器主要应用于高精度运动控制场景，特别是在半导体制造和检测设备中。以下是其主要产品应用领域：
1. 半导体晶圆检测设备
用于 KLA Tencor 21XX 系列（如 2132、2135、2138、2139 等）中的扫描平台或光学探头控制，实现高精度的单轴移动。
2. 自动光学检测设备（AOI）
在图像采集系统中控制单轴运动部件（如样品平台、显微镜镜头），保证检测过程中运动的稳定性和位置精度。
3. 精密运动控制系统
可用于需要单轴高精度控制的场景，如激光对准系统、微米级对焦系统等。
4. 科研与材料分析平台
在材料分析、表面缺陷研究等实验系统中，用于驱动移动平台实现单轴样本扫描。
功能特性简述
控制一个或两个步进电机
支持恒速运行和加减速控制
与主控系统通过定制总线或 ISA 接口通信
可实现闭环位置反馈控制
英文资料：
The KLA Tencor 710-663106-001 single axis controller is mainly used in high-precision motion control scenarios, especially in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:
1. Semiconductor wafer inspection equipment
Used for scanning platform or optical probe control in KLA Tencor 21XX series (such as 2132, 2135, 2138, 2139, etc.) to achieve high-precision single axis movement.
2. Automatic Optical Inspection Equipment (AOI)
Control the single axis moving components (such as sample platform and microscope lens) in the image acquisition system to ensure the stability and positional accuracy of the motion during the detection process.
3. Precision motion control system
Can be used in scenarios that require single axis high-precision control, such as laser alignment systems, micrometer level focusing systems, etc.
4. Research and Material Analysis Platform
In experimental systems such as material analysis and surface defect research, it is used to drive a mobile platform to achieve uniaxial sample scanning.
Description of functional characteristics
Control one or two stepper motors
Support constant speed operation and acceleration/deceleration control
Communicate with the main control system through customized bus or ISA interface
Can achieve closed-loop position feedback control
2.产 品 展 示
3.其他产品
Siemens 6ES7307-1EA01-0AA0 电源模块
4.其他英文产品
ASEA YM316001-NL Double Plate Component
Foxboro FBM230 Communication Module
Fanuc A06B-6114-H205 servo amplifier
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