KLA Tencor 0116878-001单板计算机

KLA-Tencor  0116878-001单板计算机

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 0116878-001 单板计算机 是用于 KLA-Tencor 半导体检测设备中的核心控制部件之一，主要负责处理控制信号、数据通信与设备协调等功能。

主要应用领域：

1. 半导体晶圆检测系统
   应用于 Surfscan 系列等晶圆缺陷检测设备，用于执行图像采集、运动控制和数据处理等任务。

2. 自动光学检测设备（AOI）
   在 AOI 系统中作为控制核心，负责图像分析、检测算法处理、设备通讯等。

3. 运动控制与对准系统
   控制步进电机、伺服平台、光学定位系统，确保检测探头或晶圆平台的精确移动。

4. 科研仪器和工业检测平台
   被集成在一些高端实验设备中，用于材料检测、薄膜分析和表面结构扫描。

功能特点（根据同类KLA模块推测）：

• 集成中央处理单元，用于实时控制和处理复杂任务

• 提供多种工业标准 I/O 接口（如串口、并口、网络接口）

• 支持与检测设备中其他模块的数据交换和总线通信

• 稳定性高，适用于连续长时间运行的环境

• 可与操作系统配合运行，支持定制化软件部署

英文资料：

The KLA Tencor 0116878-001 single board computer is one of the core control components used in KLA Tencor semiconductor testing equipment, mainly responsible for processing control signals, data communication, and equipment coordination functions.

Main application areas:

Semiconductor wafer inspection system

Applied to wafer defect detection equipment such as Surfscan series, it is used to perform tasks such as image acquisition, motion control, and data processing.

Automatic Optical Inspection Equipment (AOI)

As the control core in the AOI system, responsible for image analysis, detection algorithm processing, device communication, etc.

Motion Control and Alignment System

Control the stepper motor, servo platform, and optical positioning system to ensure precise movement of the detection probe or wafer platform.

Research instruments and industrial testing platforms

Integrated into some high-end experimental equipment for material detection, thin film analysis, and surface structure scanning.

Functional features (inferred from similar KLA modules):

Integrated central processing unit for real-time control and processing of complex tasks

Provide multiple industrial standard I/O interfaces (such as serial port, parallel port, network interface)

Support data exchange and bus communication with other modules in the detection equipment

High stability, suitable for environments with continuous long-term operation

Can run in conjunction with the operating system and support customized software deployment

2.产      品      展      示      

3.其他产品

Siemens 6ES7307-1EA01-0AA0 电源模块

 851-8833-001A控制器主板

 68-0061-10单板计算机

4.其他英文产品

Fanuc A06B-6114-H205 servo amplifier

GE 151X1235DB15SA01 power converter

GE IS200TRLYH1B power converter