KLA Tencor 710-609995-002控制器

KLA-Tencor 710-609995-002控制器

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 710-609995-002 控制器 – 产品应用领域

该控制器是 KLA Tencor 公司高端半导体检测与计量设备中的一类关键模块，通常负责系统级控制、运动协调、电机驱动或设备功能逻辑管理。根据KLA的设备架构及命名方式，710-609995-002 控制器具备如下典型应用：

1. 晶圆检测与量测设备的系统控制单元

• 应用于 KLA 的 Surfscan、P-series、SP系列、eBeam 等系统；

• 作为主控单元，协调设备内多个子模块（图像采集、对焦、搬运、激光扫描等）的协同工作；

• 执行实时操作系统（RTOS）或嵌入式逻辑控制任务，确保检测精度与响应速度。

2. 多轴运动平台的电机与伺服控制

• 控制 X/Y/Z 或 R 轴平台运动，支持亚微米级定位；

• 集成或配套驱动步进电机、直线电机或伺服系统，执行自动对焦、晶圆搬运等操作；

• 支持闭环反馈系统（如编码器）以提升运动精度与可靠性。

3. 光学与成像模块的同步与控制

• 管理激光发射器、图像采集器（CCD/CMOS）与处理器之间的信号协同；

• 调节扫描频率、曝光时间、光学路径对准，优化缺陷识别图像质量。

4. 系统通信与设备协调核心

• 通过多种工业通信接口（如 RS-232/422、CAN、EtherCAT、PCIe、LVDS）与主系统通信；

• 实现子模块之间的数据交换与状态同步；

• 在复杂系统中作为桥接主控板与各执行单元的中间控制层。

适用行业与系统场景

英文资料：

KLA Tencor 710-609995-002 Controller - Product Application Fields

This controller is a key module in KLA Tencor's high-end semiconductor detection and measurement equipment, typically responsible for system level control, motion coordination, motor drive, or equipment functional logic management. According to KLA's equipment architecture and naming convention, the 710-609995-002 controller has the following typical applications:

1. System control unit for wafer inspection and measurement equipment

Applied to KLA systems such as Surfscan, P-Series, SP series, eBeam, etc;

As the main control unit, coordinate the collaborative work of multiple sub modules (image acquisition, focusing, handling, laser scanning, etc.) within the device;

Execute real-time operating system (RTOS) or embedded logic control tasks to ensure detection accuracy and response speed.

2. Motor and servo control of multi axis motion platform

Control the movement of X/Y/Z or R axis platforms, supporting sub micron positioning;

Integrate or match stepper motors, linear motors, or servo systems to perform operations such as autofocus and wafer handling;

Support closed-loop feedback systems (such as encoders) to improve motion accuracy and reliability.

3. Synchronization and control of optical and imaging modules

Manage signal coordination between laser emitters, image capture devices (CCD/CMOS), and processors;

Adjust scanning frequency, exposure time, and optical path alignment to optimize defect recognition image quality.

4. System communication and equipment coordination core

Communicate with the main system through various industrial communication interfaces such as RS-232/422, CAN, EtherCAT, PCIe, LVDS;

Implement data exchange and state synchronization between submodules;

As an intermediate control layer that bridges the main control board and various execution units in complex systems.

Applicable industries and system scenarios

Application direction scenario description

Key modules such as optical scanning, image acquisition, and wafer positioning system for wafer inspection control

Measurement equipment drives multi axis platforms, focusing devices, and high-precision detectors

Automated manufacturing serves as the core of equipment control logic processing, scheduling and coordinating various functional modules

Laser and optical measurement system control laser path adjustment, focusing system, scanning head and image sensor work synchronously

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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