KLA Tencor 710-658076-20故障处理器模块

KLA-Tencor 710-658076-20故障处理器模块

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 710-658076-20 故障处理器模块 是一款用于半导体检测设备中的诊断与系统保护模块。其核心功能是在设备运行过程中，实时监控系统状态并处理各类潜在故障，从而提升设备稳定性与运行效率。

主要应用领域：

1. 晶圆缺陷检测系统
   应用于 Surfscan、SP、P系列等晶圆检测设备中，对光学扫描头、运动平台、图像处理器等关键组件进行故障预警与保护。模块可实时监控硬件状态，防止突发故障对系统造成损害。

2. 电子束量测与图像设备
   在 eBeam 或 HRP 等系列中用于监控高压系统、电磁扫描模块或成像探测器的运行状态，保障系统稳定运行并进行异常响应。

3. 运动控制与自动化平台
   在多轴自动化设备中作为安全监控单元，检测伺服系统、电源、电缆连接等部分的运行状态。当检测到故障（如过温、通信中断、电压异常）时，该模块可执行系统急停、自动重启或记录错误日志供后续分析。

4. 系统级诊断与远程维护
   模块支持KLA的远程服务接口，能够将运行日志和诊断结果发送给远程技术支持团队，用于进行预防性维护、固件升级或远程故障定位。

5. 生产线设备中的高可用性控制
   适用于要求7×24小时不间断运行的半导体产线设备，通过该模块实现冗余控制、热备份与在线故障切换，提高生产设备可靠性。

典型功能特性：

• 实时监控设备运行状态（温度、电流、电压、通信）

• 故障检测与记录错误代码

• 自动触发保护机制（如断电、重启、隔离）

• 支持远程诊断、日志采集、维护命令执行

• 可集成于KLA检测设备的主控系统或子系统

英文资料：

The KLA Tencor 710-658076-20 Fault Processor Module is a diagnostic and system protection module used in semiconductor testing equipment. Its core function is to monitor the system status in real-time and handle various potential faults during device operation, thereby improving device stability and operational efficiency.

Main application areas:

Wafer defect detection system

Applied in wafer inspection equipment such as Surfscan, SP, P series, etc., it provides fault warning and protection for key components such as optical scanning heads, motion platforms, and image processors. The module can monitor the hardware status in real time to prevent sudden failures from causing damage to the system.

Electron beam measurement and imaging equipment

Used in eBeam or HRP series to monitor the operating status of high-voltage systems, electromagnetic scanning modules, or imaging detectors, ensuring stable system operation and abnormal response.

Motion Control and Automation Platform

As a safety monitoring unit in multi axis automation equipment, it detects the operating status of servo systems, power supplies, cable connections, and other parts. When a fault is detected (such as overheating, communication interruption, abnormal voltage), the module can perform system emergency stop, automatic restart, or record error logs for subsequent analysis.

System level diagnosis and remote maintenance

The module supports KLA's remote service interface and can send operation logs and diagnostic results to remote technical support teams for preventive maintenance, firmware upgrades, or remote fault location.

High availability control in production line equipment

Suitable for semiconductor production line equipment that requires uninterrupted operation for 7 × 24 hours, this module enables redundant control, hot backup, and online fault switching to improve the reliability of production equipment.

Typical functional features:

Real time monitoring of equipment operation status (temperature, current, voltage, communication)

Fault detection and recording error codes

Automatic triggering protection mechanism (such as power outage, restart, isolation)

Support remote diagnosis, log collection, and maintenance command execution

Can be integrated into the main control system or subsystem of KLA detection equipment

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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