KLA-Tencor 710-658051-20处理器板
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-658051-20 处理器板(Processor Board)主要应用于KLA Tencor的高端晶圆检测和计量设备中,尤其是在半导体制造过程中对晶圆表面进行高速、高精度缺陷检测的系统中。
一、产品功能概述:
该处理器板通常作为系统的计算核心模块之一,负责:
图像数据采集与高速处理
缺陷分析与图像识别算法的运行
与存储、图像处理、控制单元等的协同通信
实时控制与反馈逻辑处理
二、应用领域:
半导体制造检测
应用于晶圆制造工艺的中后段,如光刻后检测、清洗后检测、蚀刻后表面检测等环节。晶圆缺陷检测系统
如 AIT、e-beam、Brightfield、Darkfield 等系列检测设备,用于捕捉晶圆表面的微米级缺陷。计量和质控设备
在产线中用作高速决策分析单元,实现自动缺陷分类(ADC)和产线反馈控制。数据密集型图像分析系统
支持大数据量图像实时运算,满足多通道并行分析的处理需求。
三、典型配套系统:
KLA Tencor AIT2 / eS / 21xx 系列设备
晶圆级缺陷检测平台
光学或电子束图像处理平台
英文资料:
The KLA Tencor 710-658051-20 processor board is mainly used in KLA Tencor's high-end wafer inspection and metrology equipment, especially in the system for high-speed and high-precision defect detection of wafer surfaces in semiconductor manufacturing processes.
1、 Product Function Overview:
This processor board is typically one of the computing core modules of the system, responsible for:
Image data acquisition and high-speed processing
The operation of defect analysis and image recognition algorithms
Collaborative communication with storage, image processing, control units, etc
Real time control and feedback logic processing
2、 Application areas:
Semiconductor Manufacturing Inspection
Applied to the middle and later stages of wafer manufacturing processes, such as post lithography inspection, post cleaning inspection, and post etching surface inspection.
Wafer defect detection system
A series of detection equipment such as AIT, e-beam, Brightfield, Darkfield, etc. are used to capture micrometer level defects on the surface of wafers.
Measurement and quality control equipment
Used as a high-speed decision analysis unit in the production line to achieve automatic defect classification (ADC) and production line feedback control.
Data intensive image analysis system
Support real-time computation of large data images to meet the processing requirements of multi-channel parallel analysis.
3、 Typical supporting system:
KLA Tencor AIT2/eS/21xx series equipment
Wafer level defect detection platform
Optical or electron beam image processing platform
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218