KLA-Tencor 710-650074-20控制器
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-650074-20 控制器 —— 产品应用领域
产品类型：ZPLL 控制器板（Zero Phase Phase-Locked Loop）
主要应用于：KLA Tencor 2132、2133 晶圆缺陷检测系统
1. 半导体晶圆缺陷检测
用于晶圆表面缺陷的高速扫描检测，特别是在光刻、刻蚀、抛光和沉积等关键工艺节点后的检查。
支持200mm和300mm晶圆的检测任务。
2. 图像采集与同步控制
作为系统的相位锁定控制核心，协调图像采集模块与信号处理模块之间的时序同步。
保证设备在高精度采样时的图像稳定性与数据准确性。
3. 高速检测系统的时钟管理
生成低噪声、高精度同步时钟信号。
对系统内部多个关键部件（如传感器、电机控制器等）提供统一时序基础。
4. 质量控制与工艺监测
适用于90nm、65nm及更先进工艺节点的质量控制。
广泛用于逻辑芯片、DRAM、NAND 等制造过程的工艺稳定性分析和良率改进。
典型使用场合：
半导体制造厂（如台积电、英特尔、三星、美光）
晶圆代工与封测厂的制程控制设备
工艺研发中心或检测实验室
英文资料：
KLA Tencor 710-650074-20 Controller - Product Application Fields
Product type: ZPLL controller board (Zero Phase Locked Loop)
Mainly used in: KLA Tencor 2132, 2133 wafer defect detection system
1. Defect detection of semiconductor wafers
Used for high-speed scanning detection of surface defects on wafers, especially after key process nodes such as photolithography, etching, polishing, and deposition.
Support detection tasks for 200mm and 300mm wafers.
2. Image acquisition and synchronization control
As the phase locking control core of the system, it coordinates the timing synchronization between the image acquisition module and the signal processing module.
Ensure the image stability and data accuracy of the device during high-precision sampling.
3. Clock management of high-speed detection system
Generate low-noise, high-precision synchronous clock signals.
Provide a unified timing basis for multiple key components within the system, such as sensors, motor controllers, etc.
4. Quality control and process monitoring
Suitable for quality control of 90nm, 65nm and more advanced process nodes.
Widely used for process stability analysis and yield improvement in manufacturing processes such as logic chips, DRAM, NAND, etc.
Typical usage scenarios:
Semiconductor manufacturing plants (such as TSMC, Intel, Samsung, Micron)
Process control equipment for wafer foundry and packaging testing plants
Process R&D center or testing laboratory
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
