KLA-Tencor 710-400180-000控制器板
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-400180-000 控制器板是一款用于半导体检测设备的电子模块,主要应用于 KLA Tencor 的 5200 系列晶圆检测系统中。
产品类型
部件号:710-400180-000
名称:控制器板(Controller Board)
制造商:KLA Tencor
产品应用领域
1. 晶圆缺陷检测系统
该控制器板被集成在 KLA Tencor 5200 系列晶圆缺陷检测设备中,负责管理图像采集、数据处理和设备控制等关键任务,确保检测系统的高效运行。
2. 系统模块间的信号协调
作为控制器板,该模块协调设备的各个子系统之间的信号传输,包括图像采集单元、数据处理模块、运动控制系统等,确保各部分协同工作,实现高效、准确的缺陷检测。
3. 高精度检测环境中的稳定运行
在高精度的晶圆检测环境中,控制器板需要具备良好的电气性能和抗干扰能力,以保证信号的完整性和系统的稳定性,从而提高检测的可靠性和准确性。
典型使用环境
半导体制造厂商:如台积电、三星、英特尔等,在晶圆制造过程中使用 KLA Tencor 5200 系列设备进行缺陷检测。
工艺研发与质量控制实验室:在新工艺开发和产品质量控制中,利用该设备进行高精度的缺陷分析。
英文资料:
The KLA Tencor 710-40018-000 controller board is an electronic module designed for semiconductor inspection equipment, primarily used in KLA Tencor's 5200 series wafer inspection systems.
product type
Part number: 710-40018-000
Name: Controller Board
Manufacturer: KLA Tencor
Product application areas
1. Wafer defect detection system
This controller board is integrated into the KLA Tencor 5200 series wafer defect detection equipment, responsible for managing key tasks such as image acquisition, data processing, and equipment control to ensure the efficient operation of the detection system.
2. Signal coordination between system modules
As a controller board, this module coordinates the signal transmission between various subsystems of the device, including the image acquisition unit, data processing module, motion control system, etc., ensuring that all parts work together to achieve efficient and accurate defect detection.
3. Stable operation in high-precision detection environment
In high-precision wafer inspection environments, the controller board needs to have good electrical performance and anti-interference ability to ensure signal integrity and system stability, thereby improving the reliability and accuracy of inspection.
Typical usage environment
Semiconductor manufacturers such as TSMC, Samsung, Intel, etc. use KLA Tencor 5200 series equipment for defect detection in the wafer manufacturing process.
Process Research and Quality Control Laboratory: Utilizing this equipment for high-precision defect analysis in new process development and product quality control.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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